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改變薄膜厚度對(duì)玻璃襯底上FePd薄膜的結(jié)構(gòu)和磁性能的影響
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廣西信息材料重點(diǎn)實(shí)驗(yàn)室,廣西信息材料重點(diǎn)實(shí)驗(yàn)室,桂林電子科技大學(xué),桂林電子科技大學(xué),廣西信息材料重點(diǎn)實(shí)驗(yàn)室,廣西信息材料重點(diǎn)實(shí)驗(yàn)室,廣西信息材料重點(diǎn)實(shí)驗(yàn)室,廣西信息材料重點(diǎn)實(shí)驗(yàn)室,廣西信息材料重點(diǎn)實(shí)驗(yàn)室

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國(guó)家重點(diǎn)基礎(chǔ)研究發(fā)展計(jì)劃（973計(jì)劃）;國(guó)家自然科學(xué)基金項(xiàng)目（面上項(xiàng)目，重點(diǎn)項(xiàng)目，重大項(xiàng)目）；廣西自然科學(xué)基金


Effect of A Change in Thickness on The Structural and Magnetic Properties of FePd Films Grown on Glass Substrate
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Guangxi Key Laboratory of Information Materials,Guangxi Key Laboratory of Information Materials,School of Material Science and Engineering,Guilin University of Electronic Technology,School of Material Science and Engineering,Guilin University of Electronic Technology,Guangxi Key Laboratory of Information Materials,Guangxi Key Laboratory of Information Materials,Guangxi Key Laboratory of Information Materials,Guangxi Key Laboratory of Information Materials,Guangxi Key Laboratory of Information Materials

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    摘要:

    采用磁控濺射方法在玻璃襯底上制備了不同厚度的FePd合金薄膜。研究了薄膜厚度對(duì)結(jié)構(gòu)和磁性能的影響。實(shí)驗(yàn)表明,在FePd合金薄膜中有序化過(guò)程發(fā)生在更厚的薄膜中。隨著薄膜厚度從d=22.5nm增加到67.5nm,面內(nèi)矯頑力剛開(kāi)始急劇增大,然后隨著薄膜厚度的進(jìn)一步增加矯頑力會(huì)減小。在d=67.5nm時(shí)面內(nèi)矯頑力最大約為3200Oe。

    Abstract:

    FePd alloy films with different thickness have been prepared by DC magnetron sputtering on glass. The effect of thin film thickness on the structural and magnetic properties was investigated. The results indicate that the ordering process in the thin FePd alloy film occurs in the thicker ones. In-plane coercivity value first increases rapidly as thickness increases from d=22.5 to 67.5 nm, and then the value decreases with further increasing film thickness. A peak value of coercivity～3200Oe appears at d=67.5 nm.

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張艷麗,成鋼,許小宗,潘曠,李林,杜玉松,張?chǎng)?馬壘,顧正飛.改變薄膜厚度對(duì)玻璃襯底上FePd薄膜的結(jié)構(gòu)和磁性能的影響[J].稀有金屬材料與工程,2017,46(7):1788~1791.[Zhang Yanli, Cheng Gang, Xu Xiaozong, Pan Kuang, Li Lin, Du Yusong, Zhang Xin, Ma Lei, Gu Zhengfei. Effect of A Change in Thickness on The Structural and Magnetic Properties of FePd Films Grown on Glass Substrate[J]. Rare Metal Materials and Engineering,2017,46(7):1788~1791.]
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  • 收稿日期:2015-04-30
  • 最后修改日期:2015-06-15
  • 錄用日期:2015-08-11
  • 在線(xiàn)發(fā)布日期: 2017-11-14
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