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等離子體增強磁控濺射制備Ti(Cr)SiC(O)N涂層的結(jié)構(gòu)和機械性能研究
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西南交通大學材料科學與工程學院,西南交通大學材料科學與工程學院,西南交通大學材料科學與工程學院,西南交通大學材料科學與工程學院,西南交通大學材料科學與工程學院,西南交通大學物理科學與技術(shù)學院,西南交通大學材料科學與工程學院

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國家自然科學基金項目（面上項目，重點項目，重大項目）


The microstructure and mechanical properties of Ti(Cr)SiC(O)N coatings deposited by plasma enhanced magnetron sputtering
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Southwest Jiaotong University,,

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    摘要:

    采用等離子體增強磁控濺射(PEMS)方法分別在硬質(zhì)合金和硅片上制備了TiSiCN, TiSiCON, TiCrSiCN, TiCrSiCON, CrSiCN 和 CrSiCON涂層。采用XRD、SEM、EDS、顯微硬度計及銷盤式摩擦磨損試驗機對含氧涂層和不含氧涂層的微觀結(jié)構(gòu)、成分和機械性能進行了研究。研究結(jié)果表明，TiSiCON, TiCrSiCON和 CrSiCON含氧涂層為TiN型（或CrN型）面心立方(fcc)結(jié)構(gòu)，但是TiSiCON, TiCrSiCON, 和 CrSiCON涂層中氧的存在會導致產(chǎn)生疏松的結(jié)構(gòu)以及相比于不含氧涂層TiSiCN, TiCrSiCN和CrSiCN更多的缺陷；氧的加入會導致Ti(Cr)SiCN涂層硬度和彈性的下降；TiCrSiCON和 CrSiCON兩種含氧涂層相比于不含氧涂層TiCrSiCN和CrSiCN有更低的摩擦系數(shù)和磨損率；然而，TiSiCON相比于TiSiCN卻表現(xiàn)出更高的摩擦系數(shù)和磨損率。

    Abstract:

    TiSiCN, TiSiCON, TiCrSiCN, TiCrSiCON, CrSiCN and CrSiCON coatings have been deposited on WC-Co substrates and Si wafers using plasma enhanced magnetron sputtering (PEMS) technique. The microstructure, composition and mechanical properties of the non-oxygen coatings and oxygen-containing coatings were studied by using XRD, SEM, EDS and load-depth-sensing indentation. The tribological behavior of the coatings against Al2O3 balls was conducted by pin-on-disc tests. The results showed that TiSiCON, TiCrSiCON and CrSiCON coatings exhibited the face center cubic (fcc) TiN-type (or CrN-type) structure but the existence of oxygen will induce loose structure and more defects for TiSiCON, TiCrSiCON and CrSiCON coatings compared with TiSiCN，TiCrSiCN and CrSiCN, respectively. The addition of oxygen element would lead to the decrease of the hardness (H) and elasticity of Ti(Cr)SiCN coatings. TiCrSiCON and CrSiCON coatings with oxygen element have lower friction coefficients and wear rate compared with TiCrSiCN and CrSiCN coatings without oxygen, respectively. While the TiSiCON with higher friction coefficient and wear rate shows poor abrasive wear resistance than TiSiCN.

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辛欣,張騰飛,王愉,喻燕,冷永祥,謝東,黃楠.等離子體增強磁控濺射制備Ti(Cr)SiC(O)N涂層的結(jié)構(gòu)和機械性能研究[J].稀有金屬材料與工程,2017,46(7):1762~1767.[Xin Xin, Zhang Tengfei, Wang Yu, Yu Yan, Leng Yongxiang, Xie Dong, Huang Nan. The microstructure and mechanical properties of Ti(Cr)SiC(O)N coatings deposited by plasma enhanced magnetron sputtering[J]. Rare Metal Materials and Engineering,2017,46(7):1762~1767.]
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  • 收稿日期:2015-04-17
  • 最后修改日期:2015-06-15
  • 錄用日期:2015-10-13
  • 在線發(fā)布日期: 2017-11-14
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