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Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors
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Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors
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National Natural Science Foundation of China (51402024, 51402023); The State Key Laboratory of Solidification Processing Funding in Northwestern Polytechnical University (NWPU) (SKLSP201224, SKLSP201317, SKLSP201211); The Special Funding for Fundamental Scientific Research of Central Colleges of Chang’an University (CHD2011JC145, 2013G3314001)

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    摘要:

    采用完整熱力學平衡分析驗證了自愈合相BxC的產(chǎn)物是溫度和初始氣體摩爾比的函數(shù)。結(jié)果表明，凝聚相的成分與溫度和氣體的摩爾比（如BCl3:(BCl3+CH4) 、H2:(BCl3+CH4)）密切相關。BxC的理想沉積條件是：BCl3:(BCl3+CH4)之比為0.8，H2:(BCl3+CH4)之比在10~105.2之間，而溫度應高于950 K。材料的富碳或者富硼主要通過調(diào)整BCl3:(BCl3+CH4)和H2:(BCl3+CH4)的氣體摩爾比來控制

    Abstract:

    The products of self-healing phase BxC were examined as a function of temperature and initial gas molar ratios of BCl3:(BCl3+CH4) and H2:(BCl3+CH4) by complete thermodynamic equilibrium analysis. The results show that the composition of the condensed phase is quite sensitive to temperature and the molar ratios of BCl3:(BCl3+CH4) and H2:(BCl3+CH4). Based on our calculation, the ideal conditions for BxC deposition are as follows: the ratio of BCl3:(BCl3+CH4) is 0.8, the ratio of H2:(BCl3+CH4) ranges from 10 to 105.2, and the temperature is above 950 K. We found that the carbon-richment or boron-richment in materials are mainly adjusted by the ratios of BCl3:(BCl3+CH4) and H2:(BCl3+CH4)

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孫國棟,鄧娟利,李 輝,張 青. Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors[J].稀有金屬材料與工程,2015,44(4):826~825.[Sun Guodong, Deng Juanli, Li Hui, Zhang Qing. Thermodynamics of Preparing BxC Condensed Phases by CVD Using BCl3-CH4-H2 as Precursors[J]. Rare Metal Materials and Engineering,2015,44(4):826~825.]
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  • 收稿日期:2014-04-25
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  • 在線發(fā)布日期: 2015-06-08
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