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氣體放電伏安特性對TiN薄膜結構和性能的影響
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西安理工大學材料科學與工程學院,南京工業(yè)大學材料科學與工程學院,西安理工大學材料科學與工程學院,西安理工大學材料科學與工程學院

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國家自然科學基金資助(項目號51271144)


Influence of volt-ampere characteristics of gas discharge on structure and properties of TiN films
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Xi’an University of Technology,Xi’an,Nanjing Tech University,Xi’an University of Technology,Xi’an,Xi’an University of Technology,Xi’an

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    摘要:

    針對濺射離子鍍離化率低及多弧離子鍍易產生微米級熔滴噴濺這一長期制約離子鍍技術發(fā)展的難題,依據金屬靶材內部電子在通過電阻值較大的組織缺陷處會導致該區(qū)域溫度上升的焦耳熱效應和金屬表面高溫下電子熱發(fā)射等物理學現象,建立以離子碰撞和靶材熱發(fā)射為脫靶機制的新型微弧離子鍍技術。通過氬離子的轟擊動能和金屬靶材內電流的焦耳熱效應共同促使靶面缺陷處溫度迅速上升,增加了該區(qū)域內電子和原子的動能使其能夠克服表面勢壘從靶材表面大量逸出。等離子區(qū)內靶材原子和電子數量的增加提高了鍍料粒子的碰撞離化率,且靶面未出現明顯電弧避免了靶材表面的熔融噴濺,從而獲得高離化率、高密度的鍍料粒子。實驗結果表明:微弧離子鍍技術制備的TiN薄膜具有致密的結構、良好的表面質量、較高的顯微硬度、較強的膜基結合力和良好的抗腐蝕性能。

    Abstract:

    The low ionization rate of magnetron sputtering ion plating and the micron-size droplet splash of multi-arc ion plating restrict the development of ion plating technique for a long time. According to the Joule heating effect which result in that the electron goes through the defect area with a relatively higher resistance value will increase the temperature of the defect area, and the thermionic emission from the metal surface with a high temperature, a new type of micro-arc ion plating technology based on the target material escaping from the target by the ion collisions and thermal emission is established. The temperature of target surface rose rapidly by the bombardment of Ar+ and Joule heating effect, the kinetic energy of the target electrons and atoms increased to overcome surface work function to escape from the target surface. The increasing of atoms and electrons in the plasma improved the collision ionization rate of the target atoms, and the target surface did not appear obvious arc and avoided the melt splashing of target material, therefore the target atoms of the micro-arc ion plating could obtain a high ionization rate and a high density. The results showed that the TiN film deposited by micro-arc ion plating has dense microstructure, fine surface quality, high hardness, well film adhesion and strong corrosion resistance.

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楊超,蔣百靈,郝娟,馮林.氣體放電伏安特性對TiN薄膜結構和性能的影響[J].稀有金屬材料與工程,2017,46(5):1419~1424.[Yang Chao, Jiang Bailing, Hao Juan, Feng Lin. Influence of volt-ampere characteristics of gas discharge on structure and properties of TiN films[J]. Rare Metal Materials and Engineering,2017,46(5):1419~1424.]
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  • 收稿日期:2015-03-05
  • 最后修改日期:2015-04-10
  • 錄用日期:2015-06-11
  • 在線發(fā)布日期: 2017-09-27
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