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Fe-Ga薄膜的微結(jié)構(gòu)與磁性能研究
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浙江理工大學(xué);臺(tái)州學(xué)院,臺(tái)州學(xué)院,浙江理工大學(xué);臺(tái)州學(xué)院,臺(tái)州學(xué)院,臺(tái)州學(xué)院,臺(tái)州學(xué)院

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浙江省自然科學(xué)基金


The Micro-structure and Magnetic Properties of Fe-Ga Thin Films
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Zhejiang Sci-Tech University;Taizhou University,Taizhou University,Zhejiang Sci-Tech University;Taizhou University,Taizhou University,Taizhou University,Taizhou University

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    摘要:

    采用磁控濺射方法，以Si(100)為襯底在40W-80W功率下制備了Fe83Ga17薄膜，通過XRD、SEM、室溫磁滯回線以及MFM的測量研究了不同濺射功率制備的Fe-Ga薄膜的結(jié)構(gòu)、形貌、磁性能和磁疇。XRD結(jié)果表明室溫下薄膜樣品是bcc(110)晶體結(jié)構(gòu)。SEM觀察結(jié)果表明薄膜顆粒在40~70 nm之間且隨著功率增大，薄膜顆粒的尺寸變大，薄膜厚度增加。室溫磁滯回線的測量結(jié)果表明一定范圍內(nèi)隨著功率增大，樣品的矯頑力Hc總體呈上升趨勢，飽和磁化強(qiáng)度Ms的變化規(guī)律并不明顯，剩余磁化強(qiáng)度Mr和矩形比Mr/Ms呈緩慢下降的趨勢，飽和磁場強(qiáng)度Hs增加。磁疇的觀察結(jié)果表明樣品的磁疇為迷宮疇結(jié)構(gòu)，且隨著功率增大，磁疇的尺寸增大。

    Abstract:

    We present a study of the growth and magnetic properties of Fe83Ga17 thin films prepared by the dc magnetron sputtering method, sputter deposited on Si(100) substrates for sputtering powers in the range 40W≤P≤80W. The structure and magnetic properties? of Fe83Ga17 thin films have been investigated by using X-ray diffraction analysis (XRD), scanning electron microscope (SEM)，physical property measurement system (PPMS) and magnetic force microscope (MFM). The results show that all samples exhibited a (110) disordered bcc structure, additional, the grain size of Fe83Ga17 thin films is about 40~70nm and the grain size slowly increases with increase in the sputtering power. The remanent magnetization Mr and the remanence ratio Mr/Ms tend to decrease slowly with increase in the sputtering power while the coercivity Hc and saturated magnetic field strength Hs go the opposite way. However, the changes in the saturation magnetization Ms are not so clear. The magnetic domain (MD) patterns showed the labyrinth structure and the domain size was increased with increase in the sputtering power.

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王天樂,馮尚申,李艷萍,李志剛,邵先亦,蔡培陽. Fe-Ga薄膜的微結(jié)構(gòu)與磁性能研究[J].稀有金屬材料與工程,2017,46(2):406~410.[wangtianle, fengshangshen, liyanping, lizhigang, shaoxianyi, caipeiyang. The Micro-structure and Magnetic Properties of Fe-Ga Thin Films[J]. Rare Metal Materials and Engineering,2017,46(2):406~410.]
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  • 收稿日期:2014-11-02
  • 最后修改日期:2014-12-04
  • 錄用日期:2015-01-13
  • 在線發(fā)布日期: 2017-04-10
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