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多層及交替多層NdFeB/Nd薄膜的磁性能研究
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太原科技大學(xué) 材料科學(xué)與工程學(xué)院,太原科技大學(xué) 材料科學(xué)與工程學(xué)院

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教育部高等學(xué)校博士學(xué)科點(diǎn)專項(xiàng)科研基金(20101415110003),山西省回國(guó)留學(xué)人員科研資助項(xiàng)目(2013-098)，山西省自然科學(xué)基金(2008011042-2）


Study on Magnetic Properties of Multilayer and Alternative Multilayer NdFeB/Nd Thin Films
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Taiyuan University of Science and Technology,Taiyuan University of Science and Technology

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    摘要:

    采用磁控濺射法制備了兩組薄膜，經(jīng)650℃退火處理后，對(duì)樣品進(jìn)行了XRD和VSM測(cè)試分析。結(jié)果表明：對(duì)于Mo/Nd/NdFeB/Nd/Mo多層薄膜，當(dāng)NdFeB/Nd厚度比為6/5時(shí)，薄膜的矯頑力最好，平行和垂直方向的矯頑力分別為14.5kOe和10.5kOe；對(duì)于Mo/[NdFeB/Nd]n/Mo(n=2,5,8,10；NdFeB/Nd厚度比為6/5 )交替多層薄膜，當(dāng)n為8時(shí)，薄膜具有最好的磁性能，平行和垂直方向的矯頑力分別為21.3kOe和16.7kOe；對(duì)于NdFeB/Nd厚度比均為6/5的薄膜，交替多層膜的綜合磁性能高于多層膜。

    Abstract:

    Two types of thin films were deposited by the magnetron sputtering method. After annealing at 650 ℃, the samples were tested and analyzed by XRD and VSM respectively. The Mo/Nd/NdFeB/Nd/Mo multilayer thin films with the thickness ratio of NdFeB/Nd=6/5 show high coercivity. The parallel and perpendicular coercivity of multilayer films were 14.5kOe and 10.5kOe respectively. The Mo/[NdFeB/Nd]n/Mo (n=2,5,8,10,NdFeB/Nd=6/5) alternative multilayer thin films with n=8 show good hard magnetic properties .The parallel and perpendicular coercivity of alternative multilayer thin films were 21.3kOe and 16.7kOe respectively. The magnetic properties of the alternative multilayer film with thickness ratio of NdFeB/Nd=6/5 was enhanced in comparison with multilayer film.

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張敏剛,劉麗.多層及交替多層NdFeB/Nd薄膜的磁性能研究[J].稀有金屬材料與工程,2017,46(1):270~273.[Zhang Mingang, Liu Li. Study on Magnetic Properties of Multilayer and Alternative Multilayer NdFeB/Nd Thin Films[J]. Rare Metal Materials and Engineering,2017,46(1):270~273.]
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  • 收稿日期:2014-10-20
  • 最后修改日期:2014-11-15
  • 錄用日期:2014-12-25
  • 在線發(fā)布日期: 2017-03-16
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