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鑲嵌結(jié)構(gòu)界面金剛石成膜機(jī)制的研究
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國家自然科學(xué)基金（51071070，51271079，50971062）


Film-Forming Mechanism of Inlay Structure Diamond Growth
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    在銅基體復(fù)合電沉積金剛石-銅過渡層，用熱絲CVD法對銅基鑲嵌結(jié)構(gòu)界面金剛石膜的初期生長過程進(jìn)行了研究。結(jié)果表明：不規(guī)則的露頭金剛石在CVD生長初期逐漸轉(zhuǎn)化為規(guī)則的刻面金剛石，長大速率呈現(xiàn)先增加后降低的趨勢，伴隨著刻面的形成，在露頭金剛石與電鍍銅二面角處開始二次形核，二次晶粒與電鍍銅形成新的二面角并促進(jìn)二次形核，如此繁衍長大的結(jié)果是二次晶粒填充在露頭金剛石顆粒溝槽之間，形成連續(xù)的金剛石膜。

    Abstract:

    The initial growth of diamond coated on Cu-diamond inlay structure interlayer deposited by composite electroplating was investigated using a hot filament chemical vapor deposition method. The results show that with the increase of the growth time, the growth rate of diamond particles decreases and the irregular diamond particles protruding out of the Cu-diamond composite interlayer change into facet particles gradually. Second diamond grains preferentially nucleate at dihedral angle formed by homoepitaxial growth diamond particles and electroplating copper and the new dihedral angle between second crystal and copper promotes new second nuclei. This type of multiplying of second nucleation growth finally fills in the gaps of the large homoepitaxial diamond particles and forms continuously diamond film.

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陳星婷,邱萬奇,劉仲武,匡同春,曾德長,周克崧.鑲嵌結(jié)構(gòu)界面金剛石成膜機(jī)制的研究[J].稀有金屬材料與工程,2014,43(12):3100~3103.[Chen Xingting, Qiu Wanqi, Liu Zhongwu, Kuang Tongchun, Zeng Dechang, Zhou Kesong. Film-Forming Mechanism of Inlay Structure Diamond Growth[J]. Rare Metal Materials and Engineering,2014,43(12):3100~3103.]
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  • 收稿日期:2013-12-26
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  • 在線發(fā)布日期: 2015-04-16
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