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不同PVD技術(shù)沉積TiN涂層的形貌和力學(xué)性能研究
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大連理工大學(xué)材料科學(xué)與工程學(xué)院,北京航空工業(yè)制造研究所,北京航空工業(yè)制造研究所,大連理工大學(xué)

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國家“973”計劃項目（2007CB613807）；國家科技支撐計劃項目（2007BAE07B01）


Study on the morphology and mechanical properties of TiN coatings prepared with different PVD methods
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School of Material Science and Engineering, Dalian University of Technolog,Beijing Aeronautical Manufacturing Technology Research Institute,Beijing Aeronautical Manufacturing Technology Research Institute,Dalian University of Technology

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    摘要:

    本文采用陰極弧沉積、中頻磁控濺射及二者的復(fù)合技術(shù)在GCr15基底上制備了TiN涂層。通過掃描電鏡、XRD譜、微米劃痕測試、硬度測試以及摩擦磨損測試對涂層的組織結(jié)構(gòu)和力學(xué)性能進(jìn)行了表征及對比。結(jié)構(gòu)表明，采用復(fù)合磁控陰極弧技術(shù)制備的TiN涂層具有較好的綜合性能，如較光滑的表面、較高的結(jié)合力和硬度，故磨損率較低。

    Abstract:

    In this paper, TiN coatings are prepared on the GCr15 substrate by the cathode arc, magnetron sputtering and their composite methods. The coatings are characterized by Scanning electron microscope (SEM), XRD spectroscopy， microscratch test, friction and wear test, and the effects of different preparation methods on the structure and mechanical properties of the coatings are compared. The results show that the coating prepared by composite arc and magnetron technique possesses better comprehensive properties such as a smooth surface, high cohesion and hardness ,so wear rate is lower.

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王明娥,馬國佳,劉星,董闖.不同PVD技術(shù)沉積TiN涂層的形貌和力學(xué)性能研究[J].稀有金屬材料與工程,2016,45(12):3080~3084.[WangMinge, MaGuoJia, LiuXing, DongChuang. Study on the morphology and mechanical properties of TiN coatings prepared with different PVD methods[J]. Rare Metal Materials and Engineering,2016,45(12):3080~3084.]
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  • 收稿日期:2014-08-19
  • 最后修改日期:2014-09-08
  • 錄用日期:2014-12-03
  • 在線發(fā)布日期: 2017-02-06
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