最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級(jí)檢索
正反歐姆區(qū)間伏安特性對(duì)鍍層均勻性及膜基結(jié)合強(qiáng)度的影響
DOI:
作者:
作者單位:

西安理工大,西安理工大學(xué),西安理工大學(xué),西安理工大學(xué)

作者簡(jiǎn)介:

通訊作者:

中圖分類(lèi)號(hào):

TB43

基金項(xiàng)目:

國(guó)家自然科學(xué)基金項(xiàng)目(面上項(xiàng)目,重點(diǎn)項(xiàng)目,重大項(xiàng)目)


The effects of volt-ampere characteristics in positive-ohm and anti-ohm sections on coating uniformity
Author:
Affiliation:

Xi'an University of Technology,Xi'an University of Technology,Xi'an University of Technology,Xi'an University of Technology

Fund Project:

  • 摘要
  • |
  • 圖/表
  • |
  • 訪問(wèn)統(tǒng)計(jì)
  • |
  • 參考文獻(xiàn)
  • |
  • 相似文獻(xiàn)
  • |
  • 引證文獻(xiàn)
  • |
  • 資源附件
  • |
  • 文章評(píng)論
    摘要:

    將靶材與真空腔之間的伏安特性引入正-反歐姆過(guò)渡區(qū)間,采用脈沖控制模式研究不同靶電流密度對(duì)鍍層均勻性和膜基結(jié)合強(qiáng)度的影響規(guī)律。實(shí)驗(yàn)發(fā)現(xiàn):當(dāng)靶面放電區(qū)電流密度(Id)由0.083A/cm2增加至0.175A/cm2時(shí),靶電壓隨靶電流密度的增大呈線性增大關(guān)系,與之對(duì)應(yīng)的鍍層厚度差由7.984μm增大至14.011μm;但當(dāng)Id由0.175A/cm2增大至0.25A/cm2時(shí),靶電壓隨靶電流密度的增大呈線性減小關(guān)系,與之對(duì)應(yīng)的鍍層厚度差則由14.011μm減小至10.077μm;而薄膜厚度減小率由97.38%(Id=0.083A/cm2)降低為89.491%(Id=0.25 A/cm2);另外,在反歐姆區(qū)膜基結(jié)合強(qiáng)度隨Id的增大而快速增大。以上結(jié)果表明:反歐姆環(huán)境下利于改善鍍層的均勻性和提高膜基結(jié)合強(qiáng)度。

    Abstract:

    This work was to introduce the voltage characteristics between the target and the vacuum chamber into positive-Ohm and anti-ohm and to study the influence rule on the uniformity of the coating and the membrane-binding intensity caused by the different target current controlled by impulse model. It was found that the target voltage increased with increasing target current density linearly when the target current density(Id) increased from 0.083A/cm2 to 0.175A/cm2. Meanwhile, the difference of coating thickness increased from 7.984μm to 14.011μm. However, the targer volttage decreased linearly with increasing target current density when the target current density increases from 0.175A/cm2 to 0.25A/cm2, and the difference of coating thickness decreased from 14.011μm to 10.077μm. The decreasing rate of film thickness changed from 97.38% (Id=0.083A/cm2) to 89.491% (Id=0.25 A/cm2). In addition, the film adhesion intensity rapidly increased with increasing target current density in the anti-ohm section. The above results show that the anti-ohm environment is conducive to improving the uniformity of the coating and the film adhesion intensity.

    參考文獻(xiàn)
    相似文獻(xiàn)
    引證文獻(xiàn)
引用本文

馮林,蔣百靈,楊超,郝娟.正反歐姆區(qū)間伏安特性對(duì)鍍層均勻性及膜基結(jié)合強(qiáng)度的影響[J].稀有金屬材料與工程,2016,45(9):2458~2461.[Feng lin, Jiang Bai Ling, Yang chao, Hao juan. The effects of volt-ampere characteristics in positive-ohm and anti-ohm sections on coating uniformity[J]. Rare Metal Materials and Engineering,2016,45(9):2458~2461.]
DOI:[doi]

復(fù)制
文章指標(biāo)
  • 點(diǎn)擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:2014-07-21
  • 最后修改日期:2014-10-15
  • 錄用日期:2014-11-20
  • 在線發(fā)布日期: 2016-10-09
  • 出版日期: