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VO2/FTO復(fù)合薄膜的制備及其光電特性研究
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上海理工大學(xué),上海理工大學(xué)

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TB43

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國家高技術(shù)研究發(fā)展計劃(863計劃)


Preparation and optical-electrical properties of VO2/FTO composite films
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university of Shanghai for science and technology,University of Shanghai for Science and Technology

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    摘要:

    采用直流磁控濺射法在摻氟的SnO2(FTO)導(dǎo)電玻璃襯底上沉積純釩金屬薄膜,再在常壓氮氧混合氣氛中退火制備VO2/FTO復(fù)合熱致變色薄膜,并對復(fù)合薄膜的結(jié)構(gòu)、光學(xué)特性以及電學(xué)特性進行了測試分析。結(jié)果表明,薄膜結(jié)晶程度較高, 表面平滑致密, 具有很好的一致性,導(dǎo)電玻璃上的FTO并沒有改變VO2擇優(yōu)取向生長,但明顯改變了VO2薄膜的表面形貌特征。與VO2薄膜的典型相變溫度68℃相比,VO2/FTO復(fù)合薄膜的相變溫度降低約20℃,熱滯回線收窄到5℃,相變前后的紅外透過率分別為45%和22%,相變前后電阻率的變化達3個數(shù)量級,VO2/FTO復(fù)合薄膜優(yōu)良的光電特性對新型光電薄膜器件的設(shè)計開發(fā)和應(yīng)用具有重要意義。

    Abstract:

    The pure vanadium metal thin films were fabricated on the SnO2 doped F conductive glass(FTO) substrates by DC magnetron sputtering at room temperature, then the VO2 /FTO composite films were prepared by annealing process in a mixture of N2 and O2. The structure and optical-electrical properties of the composite films were analyzed by instruments. AFM results show that the crystallinity of the thin film is improved significantly with smooth and uniform surface morphology. Results show that VO2 /FTO composite films do not change the preferred orientation growth of VO2 thin films, but significantly change its surface morphology characteristics. Compared with the VO2 thin films that the phase transition temperature of the VO2 /FTO composite films is decreased about 20℃, the width of thermal hysteresis is narrowed by about 5℃, and the infrared transmittances before and after phase transition are 45% and 22% respectively. The resistivity variation is up to three orders of magnitude before and after transition. This brings about many new opportunities for optoelectronic devices and industrial production.

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鄭鴻柱,李毅. VO2/FTO復(fù)合薄膜的制備及其光電特性研究[J].稀有金屬材料與工程,2016,45(6):1593~1599.[zhenghongzhu, LiYi. Preparation and optical-electrical properties of VO2/FTO composite films[J]. Rare Metal Materials and Engineering,2016,45(6):1593~1599.]
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  • 收稿日期:2014-05-20
  • 最后修改日期:2014-06-19
  • 錄用日期:2014-07-28
  • 在線發(fā)布日期: 2016-10-08
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