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鎢絲-CVD鎢復(fù)合材料制備及性能分析
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Preparation and Performance Analysis of Tungsten Wire-CVD Tungsten Composite Material
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    摘要:

    采用自制實(shí)驗(yàn)裝置,通過(guò)化學(xué)氣相沉積鎢過(guò)程中間斷纏繞鎢絲,得到鎢絲-CVD鎢復(fù)合材料。測(cè)試分析了材料的密度、成分及顯微硬度;通過(guò)壓潰試驗(yàn)計(jì)算出鎢復(fù)合材料的壓潰強(qiáng)度,通過(guò)拉伸試驗(yàn)和三點(diǎn)彎曲試驗(yàn)分別繪出拉伸和彎曲曲線。實(shí)驗(yàn)結(jié)果表明,化學(xué)反應(yīng)溫度控制在550 ℃,WF6和H2流量分別控制在2 g/min和1 L/min時(shí),可得到?jīng)]有孔洞的致密涂層。與相同工藝條件下不纏鎢絲CVD鎢樣品相比,鎢絲-CVD鎢復(fù)合材料仍具有較高的純度、致密度,顯微硬度大致相同,而壓潰強(qiáng)度、抗拉強(qiáng)度和抗彎強(qiáng)度大大提高

    Abstract:

    A kind of composite material, tungsten wire-CVD tungsten was fabricated by winding tungsten wire on the substrate periodically in the CVD process using the homemade CVD device. The density, composition and micro-hardness were tested and analyzed; the crushing strength was calculated according to crushing test; the tensile and bending curves were obtained according to tensile test and three-point bending test. The results show that the dense coating without holes can be obtained when the chemical reaction temperature is controlled at 550 oC and the flows of WF6 and H2 are controlled at 2 g/min and 1 L/min, respectively. Compared with the CVD tungsten samples without wound tungsten wire under the same process conditions, the tungsten wire-CVD tungsten composite materials still possesses high purity and density, the similar micro-hardness, but the crushing strength, the tensile strength and the bending strength are improved greatly

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馬 捷,李 輝,魏建忠,王從曾.鎢絲-CVD鎢復(fù)合材料制備及性能分析[J].稀有金屬材料與工程,2014,43(5):1334~1337.[Ma Jie, Li Hui, Wei Jianzhong, Wang Congzeng. Preparation and Performance Analysis of Tungsten Wire-CVD Tungsten Composite Material[J]. Rare Metal Materials and Engineering,2014,43(5):1334~1337.]
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  • 收稿日期:2013-05-28
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  • 在線發(fā)布日期: 2014-10-13
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