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空心陰極輔助多弧鍍(Ti,Al)N涂層物相組成及性能
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長春工業(yè)大學(xué),長春工業(yè)大學(xué)

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長春市科技支撐計(jì)劃項(xiàng)目（項(xiàng)目號11K246）


The properties and phase composition of (Ti,Al)N coating prepared by hollow cathode assisted multi-arc plating technology
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Changchun University of Technology,Changchun University of Technology

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National Natural Science Foundation of China (51205406)

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    摘要:

    摘 要:采用空心陰極離子束輔助多弧離子鍍技術(shù)，通過變換靶材中Ti-Al比例分別為30%Al、50% Al和70% Al沉積了(Ti,Al)N涂層。利用XRD、激光共聚焦顯微鏡、材料表面微納米力學(xué)測試系統(tǒng)等檢測了涂層的質(zhì)量和性能。研究了涂層的相組成、表面粗糙度、摩擦系數(shù)和硬度、以及涂層的抗氧化性能等隨靶材成分比例改變而變化的規(guī)律。結(jié)果表明，當(dāng)靶材中Al含量為50%時(shí)，沉積層相組成以Ti1-xAlxN為主，涂層粗糙度和摩擦系數(shù)為最小分別為0.3188和0.6074，而硬度值最高為34.19GPa；加熱溫度低于800℃時(shí)涂層物相組成沒有發(fā)生明顯變化，900℃是涂層產(chǎn)生開裂基體被氧化；空心陰極離子束輔助沉積時(shí)能夠形成 “混合界面”，并減輕涂層表面“大顆?！爆F(xiàn)象。

    Abstract:

    (Ti,Al)N thin films were prepared under different Ti/Al mosaic target(30%Al、50%Al、70%Al) by multi-arc ion plating technology which is in hollow cathode electron beam assisted deposition situation.The quality and properties were detected by XRD、CLSM and universal nano/micro material tester.The effects of Ti/Al target on phase composition 、surface roughness、friction coefficient、hardness and oxidation resistance were analyzed.The results show that coatings produced by 50%Al target give priority to Ti1-xAlxN phase composition and show minimum surface roughness(0.3188), friction coefficient(0.6074), maximum hardness (34.19GPa).The coating show no obvious change on phase composition when heating temperature lower than 800℃. At 900℃ substrate is oxidized due to the coating cracks. "hybrid interface" can form when hollow cathode electron beam assisted deposition,and “surface roughness” can also be reduced under this condition.

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吳化,尤申申.空心陰極輔助多弧鍍(Ti, Al)N涂層物相組成及性能[J].稀有金屬材料與工程,2016,45(5):1209~1214.[wuhua, youshenshen. The properties and phase composition of (Ti, Al)N coating prepared by hollow cathode assisted multi-arc plating technology[J]. Rare Metal Materials and Engineering,2016,45(5):1209~1214.]
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  • 收稿日期:2014-05-12
  • 最后修改日期:2014-07-03
  • 錄用日期:2014-07-28
  • 在線發(fā)布日期: 2016-06-02
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