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單晶硅表面沉積Ni-Co-P鍍層的顯微結(jié)構(gòu)和性能
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國家自然科學(xué)基金 (61107080);中央高?;究蒲袠I(yè)務(wù)費(fèi) (2010QNA08)


Microstructures and Properties of Electroless Ni-Co-P Coatings on Si (100) Substrate
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    摘要:

    采用化學(xué)鍍工藝在p型(100)單晶硅表面制備了2種Ni-Co-P鍍層,對比分析其顯微結(jié)構(gòu)和性能。結(jié)果表明:Ni48Co46P6鍍層為非晶和納米晶混合結(jié)構(gòu),表面均勻分布著直徑0.2 ~ 3.5 μm的球狀團(tuán)簇。而Ni22Co74P4鍍層為單相密排六方結(jié)構(gòu),含有強(qiáng)烈的(0002)晶面擇優(yōu)取向,表面由納米級梭狀團(tuán)簇和微米級苞狀團(tuán)簇混合而成。在3.5% NaCl溶液中,2種鍍層均表現(xiàn)出活化-鈍化-過鈍化的腐蝕行為,其中Ni48Co46P6鍍層的耐蝕性能較好。而在1.0% H2SO4溶液中,2種鍍層的耐蝕性能均大幅下降。與Ni48Co46P6鍍層相比,Ni22Co74P4鍍層的室溫電阻率略有降低,飽和磁化強(qiáng)度和矯頑力顯著升高

    Abstract:

    Two types of Ni-Co-P coatings were synthesized by electroless deposition on p-type Si (100) substrates. Microstructures and properties of the coatings were studied and compared. A mixture of amorphous and nanocrystal structures was found in Ni48Co46P6 coatings, while Ni22Co74P4 coatings contained a nanocrystalline hexagonal closed packed phase with a strong (0002) texture. Surfaces of both coatings were composed of clusters. In Ni48Co46P6 coatings, the clusters were 0.2 ~ 3.5 μm nodules that distributed uniformly, whereas in Ni22Co74P4 coatings there were nano-sized shuttle clusters mixed with micro-sized bud clusters. Both coatings exhibited activation-passivation-transpassivation processes in 3.5% NaCl solution, and Ni48Co46P6 coatings showed a better corrosion resistance. However, corrosion resistance of both Ni-Co-P coatings was decreased remarkably in 1.0% H2SO4 solution. Compared with Ni48Co46P6 coatings, Ni22Co74P4 coatings showed a much improved saturation magnetization and coercivity with a slightly decreased electrical conductivity.

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張含卓,鐘耀東,許 程.單晶硅表面沉積Ni-Co-P鍍層的顯微結(jié)構(gòu)和性能[J].稀有金屬材料與工程,2014,43(3):722~726.[Zhang Hanzhuo, Zhong Yaodong, Xu Cheng. Microstructures and Properties of Electroless Ni-Co-P Coatings on Si (100) Substrate[J]. Rare Metal Materials and Engineering,2014,43(3):722~726.]
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  • 收稿日期:2013-03-16
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  • 在線發(fā)布日期: 2014-06-27
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