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調(diào)制周期對Ti/TiB2多層膜的結構和力學性能的影響
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淮陰工學院,淮陰工學院

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中圖分類號:

TG113.25; TG174.444

基金項目:

國家自然科學基金資助(項目號51175212); 江蘇省介入醫(yī)療器械研究重點實驗室開放基金(JR1206)


Influence of modulation periods on microstructure and mechanical properties of Ti/TiB2 multilayers
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Affiliation:

Huaiyin Institute of Technology,Huaiyin Institute of Technology

Fund Project:

National “863” Program (2011AA11A256); the National Science Foundation of China (21373028, 51302014) ; New Century Educational Talents Plan of Chinese Education Ministry (NCET-12-0050); Beijing Novel Program (Z121103002512029)

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    摘要:

    采用磁控濺射法制備了Ti/TiB2周期性(T=2、3、4、6、12)多層膜,利用X射線衍射儀、場發(fā)射掃描電子顯微鏡分析了薄膜的相結構和表面(斷面)形貌,采用納米壓痕儀、多功能摩擦試驗機和顯微硬度計研究了多層膜的納米硬度、彈性模量、膜基結合力以及斷裂韌性。研究結果表明:Ti/TiB2多層膜具有清晰的納米層狀結構,薄膜表面致密平整,與基體保持著良好的物理結合。多層膜的硬度和彈性模量隨著調(diào)制周期的增加而增大,在周期T=12時,多層膜的硬度和彈性模量達到最大值,分別為35.8 GPa和349 GPa;多層膜的斷裂韌性隨著周期的增加呈現(xiàn)出先增大而后減小的趨勢,當周期T=6時多層膜的斷裂韌性最好,其斷裂韌度為2.17 MPa?m1/2。分析認為多層膜中的Ti子層可使裂紋尖端產(chǎn)生鈍化作用,從而引起裂紋擴展路徑發(fā)生偏轉,提高了多層膜的斷裂韌性。

    Abstract:

    Ti/TiB2 multilayers with various modulation periods were prepared by magnetron sputtering system. An X-ray diffraction was used to characterize the phase and a scanning electron microscope was applied to observe the surface and fracture cross-sectional morphologies of multilayers. The mechanical properties of the multilayers such as nano-hardness, elastic modulus, adhesion and fracture toughness were evaluated with nanoindentation, universal micro materials tester and microhardness meter, respectively. The results show that the surface of multilayers is even, compact and smooth with clear nano-modulate structure and presents a good physical bonding between the coating and substrate. With the increase of the modulation periods of multilayers, the hardness and elastic modulus increases and attains the maximum value of 35.8 GPa and 349 GPa at the modulation period T=12. However, the fracture toughness of multilayers increases firstly and reaches maximum value (2.17 MPa?m1/2) at the modulation period T=6 and then decreases subsequently. Passivation effect occurs at the crack tip due to the insertion of Ti sub-layer in the multilayers, which leads to a path deflection of the crack propagation, as a result, improving the fracture toughness of the multilayers.

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丁紅燕,周廣宏.調(diào)制周期對Ti/TiB2多層膜的結構和力學性能的影響[J].稀有金屬材料與工程,2016,45(2):498~502.[DING Hong-yan, Zhou Guanghong. Influence of modulation periods on microstructure and mechanical properties of Ti/TiB2 multilayers[J]. Rare Metal Materials and Engineering,2016,45(2):498~502.]
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  • 收稿日期:2014-03-27
  • 最后修改日期:2014-06-26
  • 錄用日期:2014-07-28
  • 在線發(fā)布日期: 2016-07-19
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