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ZrCoRE薄膜的結(jié)構(gòu)調(diào)控與吸氣性能研究
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Structure Modification and Sorption Characteristics of ZrCoRE Getter Films
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    摘要:

    運用掃描電鏡、掃描原子探針、X射線衍射儀和動態(tài)法分析了高硼硅玻璃表面改性對ZrCoRE薄膜結(jié)構(gòu)和吸氣性能的影響。結(jié)果表明，ZrCoRE薄膜的納米組織受襯底表面的影響較大，其表面粗糙度和結(jié)構(gòu)無序度隨襯底粗糙度增加而增大；經(jīng)300 ℃激活30 min后, Ⅰ-型薄膜（Ra=5 nm）吸氣性能隨時間下降較快，Ⅱ-型（Ra=7 nm）、Ⅲ-型（Ra=59 nm）及Ⅳ-型薄膜（Ra=125 nm）的吸氣速率依次增大并具有平穩(wěn)的吸氣平臺，Ⅳ-型薄膜吸氣性能最好

    Abstract:

    The effect of substrate surface treatments on structures and sorption properties of ZrCoRE thin film getters were analyzed by SEM, SPI, XRD and dynamic gas sorption tests. The results show that nanostructures of ZrCoRE thin films are strongly affected by the substrate surface. Both surface roughness and structure disorder degree grow with the increase of substrate surface roughness. After activation at 300 oC for 30 min, the sorption property of I-type getter film (Ra=5 nm) decreases quickly with the time. While II-type (Ra=7 nm), III-type (Ra=59 nm) and type-Ⅳ(Ra=125 nm) getter films exhibit stable gas sorption plateaus and increasing sorption speeds in sequence. Ⅳ-type getter film shows the best sorption property

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卜繼國,毛昌輝,張 艷,張心強,尉秀英,杜 軍. ZrCoRE薄膜的結(jié)構(gòu)調(diào)控與吸氣性能研究[J].稀有金屬材料與工程,2013,42(9):1889~1892.[Bu Jiguo, Mao Changhui,,Zhang Yan, Zhang Xinqiang, Wei Xiuying, Du Jun. Structure Modification and Sorption Characteristics of ZrCoRE Getter Films[J]. Rare Metal Materials and Engineering,2013,42(9):1889~1892.]
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  • 收稿日期:2012-09-23
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