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鈦摻雜無氫類金剛石薄膜疏水性能研究
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浙江省科技廳創(chuàng)新團(tuán)隊(duì)項(xiàng)目 (2010R50016)；國(guó)家自然科學(xué)基金 (51001092)；國(guó)家質(zhì)檢公益性行業(yè)科研專項(xiàng) (201210107)；江蘇省科技計(jì)劃項(xiàng)目 (BE2011114)


Hydrophobic Property of Hydrogen-Free Ti-DLC Films
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    摘要:

    采用MEVVA離子源復(fù)合磁控濺射沉積系統(tǒng)，在鈦合金Ti6Al4V基體上制備Ti摻雜DLC薄膜，研究Ti摻雜對(duì)DLC薄膜疏水性能的影響。通過X射線能譜儀（EDS）、X射線光電子譜（XPS）、原子力顯微鏡（AFM）分別對(duì)薄膜的組分、化學(xué)鍵以及表面形貌進(jìn)行分析；通過測(cè)量靜態(tài)接觸角分析薄膜的潤(rùn)濕性并計(jì)算薄膜的表面能。結(jié)果表明：Ti摻雜DLC膜明顯提高疏水性能，水接觸角最高達(dá)到105°。薄膜中sp2C雜化鍵組分增加以及表面形成Ti-O鍵，是導(dǎo)致薄膜表面能降低的重要因素

    Abstract:

    Ti-containing diamond-like carbon (Ti-DLC) films were deposited on Ti6Al4V substrate by a hybrid deposition system of MEVVA ion source and magnetron sputtering. The influence of Ti contents on the hydrophobic property of DLC films was investigated. The composition, bonding structure and surface morphology of the films were characterized by EDS, XPS and AFM, respectively. The wettability of the films was examined by the contact angle measurement. The surface energy including the dispersive and polar components was evaluated using two types of liquid with different polarity. The results show that the hydrophobicity of Ti-doped DLC films is obviously improved, whose water-contact angle increases to 105° from 68.5°. The main reason for the hydrophobicity improving may be that the surface energy of the Ti-doped DLC film is decreased by higher sp2-bonded carbon configuration and the formation of Ti-O bond

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張 林,林國(guó)強(qiáng),馬國(guó)佳,魏科科,段仲偉.鈦摻雜無氫類金剛石薄膜疏水性能研究[J].稀有金屬材料與工程,2013,42(10):2123~2126.[Zhang Lin, Lin Guoqiang, Ma Guojia, Wei Keke, Duan Zhongwei. Hydrophobic Property of Hydrogen-Free Ti-DLC Films[J]. Rare Metal Materials and Engineering,2013,42(10):2123~2126.]
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  • 收稿日期:2012-09-01
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