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鈦表面納米復(fù)合Si-C-N超硬薄膜的結(jié)構(gòu)與性能
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Microstructure and Properties of Si-C-N Nanocomposite Films on Titanium Substrate
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    摘要:

    采用電弧增強(qiáng)磁控濺射(AEMS)技術(shù)在鈦表面制備納米復(fù)合Si-C-N超硬薄膜，研究薄膜的顯微結(jié)構(gòu)、相組成、硬度、韌性、摩擦學(xué)行為和耐蝕性能。結(jié)果表明，薄膜形成了C–C、C=C、N–C以及Si–C非晶復(fù)合組織結(jié)構(gòu)。薄膜的硬度為(38.2±4.1) GPa，斷裂韌性為(3.68±0.32) MPa·m1/2。薄膜的摩擦系數(shù)為0.23左右，具有良好的抗摩擦磨損能力。沉積Si-C-N薄膜的TA2試樣在25 ℃、3.5%NaCl水溶液中的腐蝕速率為0.000 125 mm·a-1，是純TA2的12.5%，具有良好的耐蝕性能。

    Abstract:

    Si-C-N nanocomposite films on titanium substrate were prepared by arc enhanced magnetron sputtering (AEMS). The microstructure and properties of Si-C-N nanocomposite films were investigated. The results show that a nanocomposite of amorphous C–C, C=C, N–C and Si–C matrix is formed for the films. The microhardness of the films is (38.2±4.1) GPa. The fracture toughness of the films is (3.68±0.32) MPa·m1/2. Si-C-N nanocomposite films have a low friction coefficient of 0.23 at room temperature. The corrosion rate of TA2 with Si-C-N nanocomposite films is 0.000 125 mm·a-1 in 3.5%NaCl water solution at 25 oC, which is 12.5% of that of pure TA2 under the same condition. The TA2 with Si-C-N nanocomposite films has better wear resistance and corrosion resistance than pure TA2.

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趙 勇,華云峰,王彥峰,李爭(zhēng)顯.鈦表面納米復(fù)合Si-C-N超硬薄膜的結(jié)構(gòu)與性能[J].稀有金屬材料與工程,2013,42(6):1165~1168.[Zhao Yong, Hua Yunfeng, Wang Yanfeng, Li Zhengxian. Microstructure and Properties of Si-C-N Nanocomposite Films on Titanium Substrate[J]. Rare Metal Materials and Engineering,2013,42(6):1165~1168.]
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  • 收稿日期:2012-06-15
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