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濺射氣壓對(duì)鋁合金表面HPPMS沉積釩薄膜摩擦學(xué)性能的影響
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國(guó)家自然科學(xué)基金(51175118); 表面物理與化學(xué)國(guó)家重點(diǎn)實(shí)驗(yàn)室開(kāi)放基金(SPC201104)


Effects of Sputtering Pressure on Tribological Properties of Vanadium Films on Aluminum Alloy by High Power Pulsed Magnetron Sputtering
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    采用高功率脈沖磁控濺射(HPPMS)技術(shù),在鋁合金基體上制備V薄膜。研究濺射氣壓對(duì)V薄膜相結(jié)構(gòu)、表面形貌及摩擦學(xué)性能的影響。結(jié)果表明:不同氣壓下制備的V薄膜中的V相僅沿(111)晶面生長(zhǎng),其衍射峰強(qiáng)度先增強(qiáng)后減弱,當(dāng)氣壓為0.5 Pa時(shí),衍射峰最強(qiáng)且擇優(yōu)取向最明顯;同時(shí),V薄膜表面質(zhì)量最好,其表面粗糙度最小僅為0.267 nm。室溫下V薄膜樣品的耐磨性能與基體相比有大幅提高,當(dāng)氣壓為0.5 Pa時(shí),摩擦系數(shù)可由基體的0.57下降到0.28,磨痕表面無(wú)明顯的剝落跡象,表現(xiàn)出最佳的摩擦磨損性能。經(jīng)過(guò)200和300 ℃加熱處理后的V薄膜樣品的摩擦系數(shù)與基體相比具有穩(wěn)定的低值,這是由于表面氧化造成的

    Abstract:

    Vanadium films were prepared on the surface of aluminum alloy using a high power pulsed magnetron sputtering (HPPMS) method. The influences of the sputtering pressure on the phase structure, surface morphology and tribological properties of vanadium films have been investigated. Results show that the vanadium phase in the vanadium films only grows along the (111) crystal under different pressures. The diffraction peaks increase with increasing the pressure and decrease if the pressure further increasing. The diffraction peak of V(111) is the strongest and the preferred orientation is the most obvious when the pressure is 0.5 Pa. Meanwhile the vanadium film has the smoothest surface with the surface roughness of only 0.267 nm. The samples demonstrate much lower friction coefficient compared with the substrate at room temperature. The sample treated at 0.5 Pa possesses the best tribological properties with the friction coefficient decreasing from 0.57 to 0.28, and there is no obvious spalling on the worn surface. The friction coefficients of vanadium films annealed at 200 and 300 °C is low and stable compared with the unannealed samples, which is attributed to the surface oxidation

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李春偉,田修波,劉天偉,秦建偉,鞏春志,楊士勤.濺射氣壓對(duì)鋁合金表面HPPMS沉積釩薄膜摩擦學(xué)性能的影響[J].稀有金屬材料與工程,2013,42(5):1017~1022.[Li Chunwei, Tian Xiubo, Liu Tianwei, Qin Jianwei, Gong Chunzhi, Yang Shiqin. Effects of Sputtering Pressure on Tribological Properties of Vanadium Films on Aluminum Alloy by High Power Pulsed Magnetron Sputtering[J]. Rare Metal Materials and Engineering,2013,42(5):1017~1022.]
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  • 收稿日期:2012-05-16
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