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超細(xì)晶TiNi表面磁控濺射CNx薄膜的納米壓痕與摩擦性能
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江蘇省高校自然基金重大項(xiàng)目 (11KJA430004); 江蘇大學(xué)優(yōu)秀學(xué)術(shù)青年骨干培養(yǎng)對象基金 (1211110001)


Nanoindentation and Friction Properties of Magnetron Sputtered CNx Films on Ultrafine Grained TiNi Alloy
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    摘要:

    采用室溫磁控濺射技術(shù)在超細(xì)晶TiNi合金表面制備出CNx/SiC(氮化碳/碳化硅)雙層薄膜，SiC為中間層。研究了CNx薄膜的組織結(jié)構(gòu)、納米壓痕和摩擦性能。結(jié)果表明：CNx薄膜存在微孔缺陷 (基體中夾雜物脫落等原因引起)、石墨含量高、納米硬度(5.23 GPa)低、彈性模量(33.29 GPa)低，但具有高的硬度與彈性模量比值 (0.157)。在200 g載荷、氮化硅球(半徑為2 mm)為對摩件、大氣干摩擦條件下，CNx薄膜的摩擦系數(shù)約為0.173，磨損后薄膜未出現(xiàn)裂紋和剝落；在500 g載荷、室溫Kokubo人體模擬體液下，CNx薄膜的摩擦系數(shù)約為0.103，但磨損后薄膜出現(xiàn)剝落。剝落的發(fā)生可能是由于SBF溶液通過微孔缺陷進(jìn)入并腐蝕薄膜-薄膜-基材界面所致

    Abstract:

    The microstructure, nano-indentation and friction properties of the CNx/SiC (carbon nitride/silicon carbon) bilayered films (SiC as interlayer), deposited on ultrafine-grained TiNi alloy substrate using magnetron sputtering technique at room temperature, were investigated. The results show that the CNx film is not fully compact with micro-pore defections in some zones, which has been possibly caused by the breaking off of inclusions in substrates. The CNx film presents high concentration graphite, low nano-hardness (5.23 GPa), low Young's modulus (33.29 Pa), but high hardness-to-modulus ratio (0.157). As sliding against Si3N4 (silicon nitride) balls (2 mm in radius), under ambient environment and 200 g load, the CNx film exhibits the friction coefficient of about 0.173 without film cracking and interface delaminating. On the other hand, under Kokubo simulation body fluid (SBF) and 500 g load, the CNx film exhibits the friction coefficient of about 0.103, but the interface delaminating occurs that is believed to be due to that the SBF enter into the film-film-substrate interfaces through micro-pores defections and corrode the interfaces

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許曉靜,劉 敏,張?bào)w峰,凌智勇,盛新蘭,陳 丹.超細(xì)晶TiNi表面磁控濺射CNx薄膜的納米壓痕與摩擦性能[J].稀有金屬材料與工程,2013,42(3):585~588.[Xu Xiaojing, Liu Min, Zhang Tifeng, Ling Zhiyong, Sheng Xinlan, Chen Dan. Nanoindentation and Friction Properties of Magnetron Sputtered CNx Films on Ultrafine Grained TiNi Alloy[J]. Rare Metal Materials and Engineering,2013,42(3):585~588.]
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  • 收稿日期:2012-12-19
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