最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級(jí)檢索
Synthesis of TbCu7-type Structural SmCo-based Films for Microelectromechanical System Applications
DOI:
作者:
作者單位:

作者簡(jiǎn)介:

通訊作者:

中圖分類(lèi)號(hào):

基金項(xiàng)目:


Synthesis of TbCu7-type Structural SmCo-based Films for Microelectromechanical System Applications
Author:
Affiliation:

Fund Project:

National Natural Science Foundation of China (61001025); Scientific Research Foundation of CUIT (KYTZ201112)

  • 摘要
    • |
  • 圖/表
    • |
  • 訪(fǎng)問(wèn)統(tǒng)計(jì)
    • |
  • 參考文獻(xiàn)
    • |
  • 相似文獻(xiàn)
    • |
  • 引證文獻(xiàn)
    • |
  • 資源附件
    • |
  • 文章評(píng)論
    摘要:

    微機(jī)電系統(tǒng) (MEMS) 的發(fā)展要求Si基片上的永磁薄膜具有良好的熱穩(wěn)定性。采用磁控濺射工藝在單晶Si (100) 基片上沉積了SmCo基永磁薄膜，研究了濺射參數(shù)對(duì)薄膜沉積速率、微觀結(jié)構(gòu)、晶體結(jié)構(gòu)和磁性能的影響。結(jié)果表明：通過(guò)調(diào)整濺射參數(shù)可以獲得TbCu7型結(jié)構(gòu)的SmCo基永磁薄膜。該薄膜具有良好的晶粒取向和微觀結(jié)構(gòu)，因而獲得了較好的面內(nèi)磁性能，其反磁化過(guò)程主要受控于疇壁釘扎機(jī)制

    Abstract:

    Development of microelectromechanical system (MEMS) requires permanent magnetic films prepared on Si substrates with good thermal stability. The SmCo-based films were deposited on Si (100) substrates by magnetron sputtering process, and the effect of sputtering parameters on deposition rate, microstructure, crystal structure, and magnetic properties were investigated subsequently. The results show that the TbCu7-type structural SmCo-based film is obtained with adjusted sputtering parameters. The film exhibits a well preferred crystal orientation and fine microstructure, leading to better in-plane magnetic properties and a magnetization reversal process mainly controlled by domain wall pinning mechanism.

    參考文獻(xiàn)
    相似文獻(xiàn)
    引證文獻(xiàn)
引用本文

彭 龍,李樂(lè)中,陳 松,李元?jiǎng)? Synthesis of TbCu7-type Structural SmCo-based Films for Microelectromechanical System Applications[J].稀有金屬材料與工程,2013,42(3):462~465.[Peng Long, Li Lezhong, Chen Song, Li Yuanxun. Synthesis of TbCu7-type Structural SmCo-based Films for Microelectromechanical System Applications[J]. Rare Metal Materials and Engineering,2013,42(3):462~465.]
DOI：[doi]

復(fù)制
文章指標(biāo)
  • 點(diǎn)擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:2012-03-05
  • 最后修改日期:
  • 錄用日期:
  • 在線(xiàn)發(fā)布日期:
  • 出版日期: