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Effect of Technical Parameters on Surface Morphology of Electrodeposition of Iridium Layer in Aqueous System
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Effect of Technical Parameters on Surface Morphology of Electrodeposition of Iridium Layer in Aqueous System
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NSFC(51071014); ASFC(2010ZE51055)

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    摘要:

    在水體系中利用直流電沉積的方法以IrCl3為主鹽在鉑基體上制備出了Ir層。利用SEM、EDS和XPS對不同工藝參數(shù)下所制備Ir層的表面形貌及成分進行了分析,并最終獲得了最優(yōu)的電沉積工藝條件。結(jié)果表明:IrCl3主鹽濃度對Ir層形貌有較大影響,濃度太低時電沉積的銥層太薄,導致銥層易起皮或產(chǎn)生裂紋,故適當提高主鹽的濃度有利于改善Ir層質(zhì)量;在一定的pH值范圍內(nèi),電沉積所制備的Ir層表面形貌差別不大,表面均比較平整,Ir顆粒比較均勻、致密;電流密度對Ir層表面形貌尤其是對Ir層結(jié)晶顆粒的大小和致密性影響較大;電沉積溶液的溫度太低時,不能沉積出Ir層,溫度太高時,則沉積出的Ir層粗糙、表面形貌不均勻。

    Abstract:

    Iridium layer was prepared on platinum substrate under constant current in aqueous system using anhydrous iridium chloride as precursors. The surface morphology and the composition of the iridium layer were characterized by SEM, EDS and XPS. The optimized condition was derived. The results show that the concentration of iridium chloride has great influence on the surface morphology of the iridium layer. When the concentration is low, too thin iridium layer is formed, resulting in peeling or cracking. Therefore, an appropriate increase in the concentration of the precursors will help to improve the quality of the Ir layer. In a certain range of pH values, the surface morphologies of the iridium layers prepared on different conditions are nearly the same. The surface is smooth and iridium particles are uniform and dense. Current density has great influence on the surface morphology of the iridium layer, especially on the size and the density of crystalline particle. The iridium layer cannot be deposited at low solution temperature. Whereas the iridium layer is rough and its surface morphology is uneven at too high temperature.

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錢建剛,肖世明,趙 天,欒海靜. Effect of Technical Parameters on Surface Morphology of Electrodeposition of Iridium Layer in Aqueous System[J].稀有金屬材料與工程,2012,41(7):1139~1143.[Qian Jiangang, Xiao Shiming, Zhao Tian, Luan Haijing. Effect of Technical Parameters on Surface Morphology of Electrodeposition of Iridium Layer in Aqueous System[J]. Rare Metal Materials and Engineering,2012,41(7):1139~1143.]
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  • 收稿日期:2011-07-29
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