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SmCo基多元合金薄膜的成分調(diào)控研究
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國家自然科學(xué)基金 (61001025) 和成都信息工程學(xué)院科研基金 (KYTZ201112) 資助


Investigation on the Mediated Composition of SmCo-based Multinary Alloy Films
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    摘要:

    基于濺射理論和分子熱力學(xué)理論建立了SmCo基多元合金薄膜的成分調(diào)控模型，討論了濺射參數(shù)對薄膜成分的影響規(guī)律。隨后以Sm(Co0.62Fe0.25Cu0.1Zr0.03)7.5合金為靶材，采用磁控濺射工藝在單晶Si基片上制備了SmCo基多元合金薄膜，測試了不同濺射工藝制備薄膜的成分。結(jié)果表明：通過模型計(jì)算得到的薄膜成分對濺射參數(shù)的依賴關(guān)系與實(shí)驗(yàn)結(jié)果吻合，驗(yàn)證了模型的有效性

    Abstract:

    Based on the sputtering theory and molecular thermodynamics theory, a mediated composition model of SmCo-based multinary alloy films was established, and the effect of sputtering parameters on the film composition was discussed. Subsequently, the SmCo-based multinary alloy films were deposited on Si substrates by magnetron sputtering from Sm(Co0.62Fe0.25Cu0.1Zr0.03)7.5 alloy target. The composition of the films prepared by different sputtering parameters was measured. The results show that the dependence of the film composition on sputtering parameters observed from the model agrees well with the experiment results, which gives a favorable support to the acquired model

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彭 龍,李元?jiǎng)? SmCo基多元合金薄膜的成分調(diào)控研究[J].稀有金屬材料與工程,2012,41(6):1055~1059.[Peng Long, Li Yuanxun. Investigation on the Mediated Composition of SmCo-based Multinary Alloy Films[J]. Rare Metal Materials and Engineering,2012,41(6):1055~1059.]
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  • 收稿日期:2011-06-16
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