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鎢釩共濺熱致變色薄膜的制備及其紅外光學(xué)性能
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國家高技術(shù)研究發(fā)展計(jì)劃(“863”計(jì)劃)資助(2006AA03Z348);教育部科學(xué)技術(shù)研究重點(diǎn)項(xiàng)目(207033);上海市科學(xué)技術(shù)委員會(huì)科技攻關(guān)計(jì)劃項(xiàng)目(06DZ11415);上海市教育委員會(huì)科研創(chuàng)新重點(diǎn)項(xiàng)目(10ZZ94);廣東省自然科學(xué)基金(10152902001000025);上海市重點(diǎn)學(xué)科(S30502)資助課題


Preparation and Infrared Optical Properties of W-V Co-sputtered Thermochromic Thin Films
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    摘要:

    為解決VO2薄膜相變溫度過高,熱滯回線溫寬過大以及摻雜后紅外透過率變低等問題,開展了低成本鎢釩共濺熱致變色薄膜制備工藝的探索。先在室溫條件下采用磁控共濺射的方法于玻璃基片上制備得到含鎢量為1.4%的金屬薄膜,再在空氣中采用后退火工藝使金屬薄膜充分氧化為熱致變色薄膜。對薄膜樣品的物理結(jié)構(gòu)和光學(xué)性能進(jìn)行了分析,發(fā)現(xiàn)鎢釩共濺沒有改變VO2薄膜在玻璃表面擇優(yōu)取向生長,但顯著改變了VO2薄膜的表面形貌特征。觀察到鎢釩共濺熱致變色薄膜的相變溫度較普通VO2薄膜從68 ℃降低至40 ℃,熱滯回線溫寬由6 ℃縮小為3 ℃,低溫半導(dǎo)體相的紅外透過率分別為62%和57%。結(jié)果表明,鎢釩共濺可達(dá)到相變溫度降低,熱滯回線溫寬變窄,摻雜前后紅外透過率變化不大之目的。

    Abstract:

    Tungsten-vanadium (W-V) co-sputtered thermochromic thin films of low-cost were designed in order to solve the problems of pure vanadium dioxide (VO2) thin films including high phase transition temperature, broad width of thermal hysteresis loop and low infrared transmittance after being doped. The metal thin films of 1.4% tungsten concentration were prepared on the glass substrates by magnetron co-sputtering at room temperature, and then the prepared metal thin films were sufficiently oxidized to the thermochromic thin films by annealing under the air condition. The structure and morphology of the samples collected from the prepared thin films were analyzed by XPS, XRD and SEM, which shows that W-V co-sputtering approach does not modify the preferred orientation growth of VO2 thin films on glass substrates, but significantly changes the surface morphologies of VO2 thin films. The optical properties of W-V co-sputtered thin films were compared with that of VO2 thin films by spectrophotometer, and the phase transition temperature drops from 68 oC to 40 oC, the width of thermal hysteresis loop narrows from 6 oC to 3 oC, and the infrared transmittances at low temperature are 62% and 57%, respectively. Results demonstrate W-V co-sputtering approach can reduce the phase transition temperature, limit the thermal hysteresis loop and gently change the infrared transmittance.

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周 晟,李 毅,朱慧群,孫若曦,張宇明,黃毅澤,李 榴,沈雨剪,鄭秋心,佟國香,方寶英.鎢釩共濺熱致變色薄膜的制備及其紅外光學(xué)性能[J].稀有金屬材料與工程,2012,41(1):143~147.[Zhou Sheng, Li Yi, Zhu Huiqun, Sun Ruoxi, Zhang Yuming, Huang Yize, Li Liu, Shen Yujian, Zheng Qiuxin, Tong Guoxiang, Fang Baoying. Preparation and Infrared Optical Properties of W-V Co-sputtered Thermochromic Thin Films[J]. Rare Metal Materials and Engineering,2012,41(1):143~147.]
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  • 收稿日期:2011-01-02
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