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鈦合金表面大氣壓等離子體槍制備類金剛石薄膜
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北京市優(yōu)秀人才培養(yǎng)項目


Diamond-like Carbon Thin Films Deposited on Ti6Al4V Alloy Surface by Plasma Gun at Atmospheric Pressure
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    摘要:

    在大氣下,采用大氣壓介質(zhì)阻擋放電(DBD)等離子體槍在低溫下(<350 ℃),以甲烷為單體,氬氣為工作氣體,在Ti6Al4V鈦合金表面制備一層類金剛石薄膜(DLC),以期改善鈦合金表面摩擦學(xué)性能。利用激光拉曼(Raman)光譜和X射線光電子能譜(XPS)分析了所制備DLC薄膜的結(jié)構(gòu);利用掃描電子顯微鏡(SEM)觀察DLC薄膜的表面形貌;利用劃痕儀測量了DLC薄膜與基體的結(jié)合力;利用球-盤摩擦磨損實驗儀對DLC薄膜的耐磨性能進(jìn)行了研究。結(jié)果表明:在本實驗工藝條件下沉積的類金剛石薄膜厚度約為1.0 μm,薄膜均勻且致密,表面粗糙度Ra為13.23 nm。類金剛石薄膜與基體結(jié)合力的臨界載荷達(dá)到31.0 N。DLC薄膜具有優(yōu)良的減摩性,Ti6Al4V表面沉積DLC薄膜后摩擦系數(shù)為0.15,較Ti6Al4V基體的摩擦系數(shù)0.50明顯減小,耐磨性能得到提高。

    Abstract:

    At atmospheric pressure, diamond-like carbon (DLC) thin films were deposited on the Ti6Al4V alloy surface by a DBD plasma gun at low temperature (<350 oC), with CH4 as a precursor and Ar as dilution gas. The structure of the DLC thin film was analyzed by Laser Raman spectroscope and X-ray photoelectron spectroscopy. The surface morphology was observed through scanning electron microscopy. The adhesion between the DLC thin film and the substrate was investigated with the scribe testing. The friction and wear behavior of the DLC thin films under dry sliding against GCr15 steel was evaluated on a ball-on-disc test rig. The results show that it is feasible to prepare a DLC thin film of 1.0 μm thickness by a plasma gun. The film is uniform and dense and the surface roughness Ra is about 13.23 nm. The critical load of adhesion force between the DLC thin film and the substrate is 31.0 N. It has been found that the DLC thin film has excellent friction- and wear-resistant behavior. The friction coefficient of the Ti6Al4V substrate is about 0.50 under dry sliding against steel, while the DLC thin film experiences much abated friction coefficient to 0.15 under the same testing condition.

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陳 飛,周 海,張躍飛,呂反修.鈦合金表面大氣壓等離子體槍制備類金剛石薄膜[J].稀有金屬材料與工程,2012,41(1):124~128.[Chen Fei, Zhou Hai, Zhang Yuefei, Lü Fanxiu. Diamond-like Carbon Thin Films Deposited on Ti6Al4V Alloy Surface by Plasma Gun at Atmospheric Pressure[J]. Rare Metal Materials and Engineering,2012,41(1):124~128.]
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  • 收稿日期:2011-01-05
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