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FeCoNiB軟磁薄膜微波電磁性能研究
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高等學(xué)校博士學(xué)科點(diǎn)專項(xiàng)科研基金（20090142110004）


Microwave Electromagnetic Characteristics of FeCoNiB Soft Magnetic Thin Films
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    摘要:

    采用射頻磁控濺射工藝，制備了一系列 (Fe40Co40B20)1-xNix (x為原子分?jǐn)?shù))磁性薄膜，研究了樣品在微波頻段下的電磁性能。結(jié)果表明，通過調(diào)整Ni含量及合適的工藝參數(shù)可有效調(diào)控薄膜的微結(jié)構(gòu)和電磁性能，且在(Fe40Co40B20)0.91Ni9薄膜樣品中獲得了優(yōu)良的微波性能和高電阻率。其飽和磁化強(qiáng)度4πMs達(dá)到2.21 T，復(fù)磁導(dǎo)率實(shí)部μ'在0.5~3 GHz頻率范圍內(nèi)大于195，鐵磁共振頻率fFMR達(dá)到3.16 GHz，電阻率也達(dá)到276 μΩ·cm。該薄膜可應(yīng)用于GHz頻段下電磁器件的設(shè)計(jì)中。

    Abstract:

    A series of (Fe40Co40B20)1-xNix magnetic thin films (x is atomic fraction) were synthesized by magnetron sputtering (RF), and the electromagnetic and microwave properties were investigated. The results show that the microstructure and electromagnetic properties of the films can be altered by varying the content of Ni addition and suitable process parameters. Excellent microwave properties and high resistivity are achieved in the (Fe40Co40B20)0.91Ni9 thin film. The film has the saturation magnetization 4πMs of 2.21 T, the real part of complex permeability μ' is larger than 195 at 0.5-3.0 GHz fFMR reaches to 3.16 GHz, and the resistivity is 276 μΩ·cm. Therefore, the presented films have the potential for the electromagnetic device design in the GHz frequency range.

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邱 景,龔榮洲,馮則坤,廖健生. FeCoNiB軟磁薄膜微波電磁性能研究[J].稀有金屬材料與工程,2011,40(10):1840~1843.[Qiu Jing, Gong Rongzhou, Feng Zekun, Liao Jiansheng. Microwave Electromagnetic Characteristics of FeCoNiB Soft Magnetic Thin Films[J]. Rare Metal Materials and Engineering,2011,40(10):1840~1843.]
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  • 收稿日期:2010-10-21
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