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XRD研究Fe、C摻雜對He離子注入Al表面晶格畸變的影響
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國家自然科學基金 (50671017)


Effect of Fe and C Doping on the Lattice Distortion of He Ion Implanted Al Surface by XRD
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    摘要:

    用離子注入技術(shù)實現(xiàn)了Al表面Fe、C元素的摻雜，并用XRD研究Fe、C摻雜對He離子注入Al表面晶格畸變的影響。結(jié)果發(fā)現(xiàn)，預先摻雜的Fe、C在Al表面的晶格畸變中扮演重要角色，且影響程度與摻雜劑量有關(guān)。隨著預先摻雜Fe劑量的增大，Al表面晶格畸變量先減小后增加，表明小劑量的Fe摻雜有助于降低He離子注入引起的晶格畸變。C摻雜后能進一步降低預先摻雜Fe引起的晶格畸變，降低程度隨C劑量的增加而增加?？梢?，小劑量的Fe和高劑量的C共摻雜能有效降低He離子注入后Al表面的晶格畸變

    Abstract:

    Effect of Fe and C doping via ion implantation on the lattice distortion of He ion implanted Al surface was studied by X-ray diffraction (XRD). The results show that the pre-doped Fe and C play an important part in the lattice distortion of Al surface, and the influence extent depends on the doping fluence. With the increase of the fluence of pre-doped Fe, the lattice distortion of Al surface decreases first and then increases, indicating that Fe doping of small fluence is beneficial for the reduction of lattice distortion of He implanted Al. C doping can further reduce the lattice distortion caused by the earlier Fe doping, and the reduction extent increases with the fluence of doped C increasing. It is concluded that small fluence of Fe and high fluence of C co-doping can effectively reduce the lattice distortion of the He implanted Al surface

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向 鑫,陳長安,蔣春麗. XRD研究Fe、C摻雜對He離子注入Al表面晶格畸變的影響[J].稀有金屬材料與工程,2011,40(9):1610~1615.[Xiang Xin, Chen Chang’an, Jiang Chunli. Effect of Fe and C Doping on the Lattice Distortion of He Ion Implanted Al Surface by XRD[J]. Rare Metal Materials and Engineering,2011,40(9):1610~1615.]
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  • 收稿日期:2010-09-13
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