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Effect of the β Phase on Compressive Mechanical Property of CVD Tungsten
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Effect of the β Phase on Compressive Mechanical Property of CVD Tungsten
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National Defense Basic Research Program of China (B0120110036)

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    摘要:

    The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440 °C is much lower than that with only α phase deposited at 540 °C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400 °C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

    Abstract:

    The high pure W (HPW) was deposited on the surface of purity Cu tubes through WF6 reduction by H2 adopting cold-wall atmospheric pressure CVD system. Results show that the compressive strength of the tungsten tube with the mixture phase deposited at 440 °C is much lower than that with only α phase deposited at 540 °C. The existence of β phase has a significant negative influence on the compressive property. After annealing treatment at 400 °C for 1 h, the β phase in the mixture will disappear, and its compressive strength reaches the level of the as-deposited α-W.

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Lü Yanwei, Yu Xiaodong, Tan Chengwen, Sun Tiefeng, Ma Kunsong, Cai Hongnian. Effect of the β Phase on Compressive Mechanical Property of CVD Tungsten[J].稀有金屬材料與工程,2011,40(7):1138~1140.[Lü Yanwei, Yu Xiaodong, Tan Chengwen, Sun Tiefeng, Ma Kunsong, Cai Hongnian. Effect of the β Phase on Compressive Mechanical Property of CVD Tungsten[J]. Rare Metal Materials and Engineering,2011,40(7):1138~1140.]
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  • 收稿日期:2010-07-21
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