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不同氮分壓下磁控濺射ZrN對鈦/瓷結(jié)合的影響
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江蘇省技術(shù)引進(jìn)與合作研發(fā)項(xiàng)目(BZ2008059)；江蘇省“興衛(wèi)工程”重點(diǎn)人才項(xiàng)目(RC2007099)


Influence of N2 Partial Pressure of Zirconium Nitride by Magnetron Sputtering on the Bonding Strength of Titanium/Porcelain
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    摘要:

    探討不同氮分壓下磁控濺射氮化鋯(ZrN)涂層對純鈦與低熔瓷粉(Vita鈦瓷粉系統(tǒng))結(jié)合強(qiáng)度的影響。60個(gè)純鈦基片隨機(jī)分為1個(gè)對照組和3個(gè)實(shí)驗(yàn)組。實(shí)驗(yàn)組分別在不同氮分壓下(Ta組1.0×10-2 Pa，Tb組5.0×10-2 Pa和Tc組10.0×10-2 Pa)濺射沉積ZrN涂層。純鈦試樣經(jīng)表面處理后在烤瓷爐中進(jìn)行燒結(jié)。用XRD檢測到ZrN立方新相。萬能試驗(yàn)機(jī)測試鈦瓷試樣三點(diǎn)抗彎強(qiáng)度，對照組為 (26.67 ± 0.88) MPa， 實(shí)驗(yàn)組分別為：Ta (49.41 ± 0.55) MPa，Tb (54.55 ± 0.69) MPa和Tc (46.24 ± 0.53) MPa，四組間差別均有統(tǒng)計(jì)學(xué)意義(P < 0.05)。SEM觀察表明，實(shí)驗(yàn)組鈦/瓷結(jié)合良好，鈦基底殘留的瓷斷面數(shù)量較多，面積較大。不同氮分壓下濺射沉積的ZrN涂層對鈦/瓷結(jié)合的增強(qiáng)程度有所不同，5.0×10-2 Pa下鈦/瓷結(jié)合增強(qiáng)最為明顯

    Abstract:

    The influence of zirconium nitride (ZrN) deposited by magnetron sputtering under different N2 partial pressure on the bonding strength of titanium porcelain was investigated. 60 commercially pure cast titanium specimens were randomly subjected to 1 contrast group and 3 test groups, named Ta, Tb and Tc. All test groups were treated with ZrN deposited under different N2 partial pressure by magnetron sputtering (group Ta 1.0×10-2 Pa, group Tb 5.0×10-2 Pa and group Tc 10.0×10-2 Pa). The pure titanium specimens were sintered after surface treatment. The compositions of the deposits were analyzed by X-ray diffraction (XRD). A universal testing machine was used to perform the three-point bending test to evaluate the bonding strength of Ti and porcelain. The microstructure of ZrN, the interface of Ti/porcelain and the fractured Ti surface were observed by scanning electron microscopy (SEM) and digital microscope. The XRD results prove that the ZrN deposits are cubic crystalline phases. The bonding strength of Ti and porcelain of each group are as following: group contrast (26.67±0.88) MPa, group Ta (49.41±0.55) MPa, group Tb (54.55±0.69) MPa and group Tc (46.24±0.53) MPa. Statistical differences were recorded (P<0.05). The results of SEM show that the Ti/porcelain interface of contrast group possesses pre-cracks, while samples of test group have better combinations. ZrN film deposited by magnetron sputtering can enhance Ti/porcelain bonding. ZrN films deposited under the N2 partial pressure of 5.0×10-2 Pa bring the highest Ti/porcelain bonding strength

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王舒舒,吳湘君,光寒冰,周 淑,張文艷,章非敏.不同氮分壓下磁控濺射ZrN對鈦/瓷結(jié)合的影響[J].稀有金屬材料與工程,2011,40(5):803~806.[Wang Shushu, Wu Xiangjun, Guang Hanbing, Zhou Shu, Zhang Wenyan, Zhang Feimin. Influence of N2 Partial Pressure of Zirconium Nitride by Magnetron Sputtering on the Bonding Strength of Titanium/Porcelain[J]. Rare Metal Materials and Engineering,2011,40(5):803~806.]
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  • 收稿日期:2010-05-18
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