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熱處理工藝對無氟PA-MOD法制備YBCO超導(dǎo)薄膜的影響
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國家自然科學(xué)基金（50672078）；國家杰出青年基金（50588201）；國家“863”項(xiàng)目（2007AA03Z203）


Influence of Heat Treatment on YBCO Superconducting Films Prepared by a Fluorine-Free PA-MOD Method
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    摘要:

    采用無氟的高分子輔助金屬有機(jī)物沉積（PA-MOD）法在（00l）LaAlO3單晶基底上制備了超導(dǎo)轉(zhuǎn)變溫度Tc = 90 K的YBCO超導(dǎo)薄膜。研究了高溫?zé)崽幚磉^程中不同成相溫度和氣氛濕度對制備高性能YBCO薄膜的影響。通過X射線衍射（XRD）θ-2θ掃描、ω掃描和φ掃描分析了不同熱處理工藝制備的YBCO薄膜的雙軸織構(gòu)程度；通過掃描電鏡（SEM）測試研究了不同薄膜樣品的表面形貌；采用超導(dǎo)量子干涉儀測量了薄膜的超導(dǎo)轉(zhuǎn)變溫度曲線和磁化曲線。結(jié)果表明，770 ℃干燥氣氛中成相的樣品具有優(yōu)異的雙軸織構(gòu)及平整、致密的表面形貌。采用該優(yōu)化工藝制備的YBCO薄膜在77 K零場下的臨界電流密度（Jc）達(dá)到2 MA/cm2，是其它工藝制備薄膜Jc的1.7~6.7倍。

    Abstract:

    YBCO superconducting films with Tc of 90 K were prepared via fluorine-free polymer-assisted metal organic deposition (PA-MOD) on (001) LaAlO3 single crystal substrate. The influence of different firing temperatures and gas humidities during high-temperature heat treatment was investigated to fabricate high performance YBCO films. The degree of biaxial texture for the films by different heat treatments was analyzed by X-ray diffraction θ-2θ scan, ω scan and φ scan. Surface morphologies were studied by scanning electron microscopy (SEM). Magnetic moment versus temperature curves and magnetic hysteresis loops were measured by Quantum-Design SQUID XL (7 T). The results show that the YBCO film fired at 770 oC in dry gas has excellent biaxial texture as well as smooth and dense surface morphology. The YBCO film prepared by this optimized treatment has critical current density Jc of 2 MA/cm2 (77 K, self-field) which is 1.7 to 6.7 times of that for YBCO films by other heat treatments.

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王文濤,蒲明華,師曉燕,王 偉,C. H. Cheng,趙 勇.熱處理工藝對無氟PA-MOD法制備YBCO超導(dǎo)薄膜的影響[J].稀有金屬材料與工程,2010,39(11):2003~2006.[Wang Wentao, Pu Minghua, Shi Xiaoyan, Wang Wei, C. H. Cheng, Zhao Yong. Influence of Heat Treatment on YBCO Superconducting Films Prepared by a Fluorine-Free PA-MOD Method[J]. Rare Metal Materials and Engineering,2010,39(11):2003~2006.]
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  • 收稿日期:2009-11-25
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