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TiNi/ZnO復(fù)合智能薄膜的制備及性能研究
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Research on Preparation and Properties of TiNi/ZnO Intelligent Thin Films
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    摘要:

    使用射頻磁控濺射法在石英襯底上制備quartz/ZnO/TiNi及quartz/TiNi/ZnO復(fù)合薄膜結(jié)構(gòu)，利用XRD、SEM劃痕儀等測試方法研究了復(fù)合薄膜的相結(jié)構(gòu)、微觀組織、力學(xué)性能。利用DMA分別研究了quartz/TiNi與quartz/ZnO/TiNi復(fù)合結(jié)構(gòu)的阻尼性能隨振動頻率及振幅的變化規(guī)律。結(jié)果表明，前者頻率響應(yīng)范圍在10 Hz以內(nèi)，后者響應(yīng)范圍達到20 Hz；前者的臨界外加激振電壓僅為0.6 V，后者的臨界外加激振電壓達到1.0 V。阻尼性能測試表明，quartz/ZnO/TiNi復(fù)合結(jié)構(gòu)的阻尼性能優(yōu)于quartz/TiNi復(fù)合結(jié)構(gòu)。由劃痕儀測得兩種復(fù)合薄膜結(jié)構(gòu)與基體的臨界結(jié)合力分別為45.75和40.15 N

    Abstract:

    Quartz/ZnO/TiNi and quartz/TiNi/ZnO multilayer films were prepared by RF magnetron sputtering process on the quartz substrate. The phase composition, microstructure and mechanical properties of the multilayer films were investigated by XRD, SEM and scratch test methods, respectively. The change rule of the damping capability with the frequency and amplitude was investigated by DMA for quartz/TiNi and quartz/ZnO/TiNi multilayer films. Results show that the frequency response of quartz/TiNi is within 10 Hz, while that of quartz/ZnO/TiNi almost reaches to 20 Hz. The damping amplitude of quartz/ZnO/TiNi is 1.0 V, while that of quartz/TiNi is only 0.6 V. The damping capability of quartz/ZnO/TiNi is superior to that of quartz/TiNi. The critical adhesion forces between the multilayer thin film and quartz substrate for quartz/ZnO/TiNi and quartz/TiNi are 45.75 N and 40.15 N, respectively

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曾 光,李子全,周衡志. TiNi/ZnO復(fù)合智能薄膜的制備及性能研究[J].稀有金屬材料與工程,2010,39(8):1447~1450.[Zeng Guang, Li Ziquan, Zhou Hengzhi. Research on Preparation and Properties of TiNi/ZnO Intelligent Thin Films[J]. Rare Metal Materials and Engineering,2010,39(8):1447~1450.]
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  • 收稿日期:2009-11-16
  • 最后修改日期:2010-03-17
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