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化學(xué)氣相沉積高純鎢的擇優(yōu)取向與性能研究
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Research on Texture and Mechanical Performance of High-Purity CVD Tungsten
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    摘要:

    利用光學(xué)顯微鏡、X射線衍射(XRD)和掃描電子顯微鏡的電子背散射衍射花樣(electronic backscatter ring diffraction，EBSD)，對用化學(xué)氣相沉積制備的高純鎢進(jìn)行了微觀結(jié)構(gòu)和晶面取向分析；利用霍普金森壓桿系統(tǒng)和電子萬能試驗機測試了高純鎢的動態(tài)和準(zhǔn)靜態(tài)力學(xué)性能。研究表明：化學(xué)氣相沉積高純鎢具有柱狀晶組織，并且具有明顯的(100)擇優(yōu)取向；動態(tài)屈服強度達(dá)到2000 MPa以上，靜態(tài)屈服強度約為1350 MPa，具有應(yīng)變速率敏感性

    Abstract:

    The microstructure and grain orientation of the high-purity tungsten prepared by a CVD method (CVD-W) were analyzed by optical microscope (OM), X-ray diffraction (XRD) and electron backscatter ring diffraction (EBSD) in a scanning electron microscopy (SEM). The dynamic and static mechanical performances were tested by Hopkinson split-bar and electron testing machinery. Results show that the CVD-W is of columnar-grain microstructure and has (100) texture. The dynamic yield strength of the CVD-W is above 2000 MPa, and the static yield strength is about 1350 MPa. CVD-W has strain-rate sensitivity

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孫紅嬋,李樹奎,于小東,譚成文,王富恥.化學(xué)氣相沉積高純鎢的擇優(yōu)取向與性能研究[J].稀有金屬材料與工程,2010,39(8):1415~1418.[Sun Hongchan, Li Shukui, Yu Xiaodong, Tan Chengwen, Wang Fuchi. Research on Texture and Mechanical Performance of High-Purity CVD Tungsten[J]. Rare Metal Materials and Engineering,2010,39(8):1415~1418.]
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  • 收稿日期:2009-08-21
  • 最后修改日期:2010-05-20
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