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脈沖激光沉積摻W類金剛石膜的性能
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中國(guó)工程物理研究院重大基金資助課題（2005Z0805）


Properties of W Doped Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition
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    摘要:

    采用氟化氪（KrF）脈沖準(zhǔn)分子激光燒蝕沉積（PLD）技術(shù)，在硅基體表面制備不同摻W時(shí)間的類金剛石薄膜（W-DLC）。利用AFM、XRD、Raman、納米壓痕等手段分析和研究薄膜的表面形貌、結(jié)構(gòu)以及部分性能。結(jié)果表明：W摻入后形成了α-W2C和WC相，并且沒有明顯改變薄膜中sp2和sp3鍵的含量，薄膜的表面粗糙度基本不受W摻入時(shí)間的影響，殘余應(yīng)力降低約1個(gè)數(shù)量級(jí)（二十幾個(gè)GPa下降到幾個(gè)GPa），硬度和彈性模量隨W摻入時(shí)間的增加而逐漸降低。

    Abstract:

    Diamond-like carbon films (DLC) doped with W for different time on Si substrate surface were prepared by KrF pulsed excimer laser ablution deposition (PLD) technique. The surface morphology, microstructure and some properties of the films were researched by AFM, XRD, Raman spectra and nano indenter. Results show that α-W2C and WC phases were formed after W doping, but the content of sp2 and sp3 in the film did not change obviously. The surface roughness was not sensitive to the W doping time. W doping resulted in the decrease of the residual stress by a magnitude (from higher than 20 GPa to several GPa). Meanwhile, the hardness and modulus of the films were decreased with increasing of W doping time.

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王雪敏,吳衛(wèi)東,李盛印,陳松林,唐永建,白 黎,王海平.脈沖激光沉積摻W類金剛石膜的性能[J].稀有金屬材料與工程,2010,39(7):1251~1255.[Wang Xuemin, Wu Weidong, Li Shengyin, Chen Songlin, Tang Yongjian, Bai Li, Wang Haiping. Properties of W Doped Diamond-Like Carbon Films Prepared by Pulsed Laser Deposition[J]. Rare Metal Materials and Engineering,2010,39(7):1251~1255.]
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  • 收稿日期:2009-08-28
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