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靶材用鎢銅復(fù)合材料的制備工藝
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國家自然科學(xué)基金(50834003)


Fabrication Technology of Tungsten Copper Composite for Sputtering Material
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    摘要:

    在真空條件下,采用高溫?zé)Y(jié)鎢骨架后滲銅工藝制備靶材用鎢銅復(fù)合材料,研究燒結(jié)溫度對鎢坯及鎢銅復(fù)合材料組織與性能的影響。結(jié)果表明:隨著燒結(jié)溫度的提高,鎢顆粒間逐漸由點(diǎn)接觸擴(kuò)大為面接觸,燒結(jié)頸逐漸長大,同時孔隙不斷縮小并趨于球形,鎢骨架和鎢銅復(fù)合材料相對密度及硬度不斷增加,而鎢銅復(fù)合材料的電導(dǎo)率不斷下降。當(dāng)燒結(jié)溫度為1950 ℃時,鎢骨架和鎢銅復(fù)合材料的相對密度分別達(dá)到74.8%和96.9%的最高值;鎢銅復(fù)合材料的硬度(HB)達(dá)最大值2520 MPa,而電導(dǎo)率則降低到36.6IACS%,其中氧含量僅為4×10-6,氮含量為3×10-6。

    Abstract:

    Tungsten copper composite for sputtering materials was fabricated by sintering a tungsten skeleton at high temperature under the vacuum condition followed by infiltration of copper. The effect of sintering temperature on microstructures and properties of the tungsten skeleton and the tungsten copper composite were investigated. The results show that with increasing of the sintering temperature, the point touch becomes face touch between tungsten particles; the sintering necks grow and the pores reduce to sphericity gradually. Meanwhile, the relative density and hardness of the tungsten skeleton and the tungsten copper composite increase constantly and the electric conductivity of the composite decreases correspondingly. When sintered at 1950 oC, the relative density of the tungsten skeleton and the tungsten copper composite reaches the maximum of 74.8% and 96.9%, respectively; the hardness (HB) of the tungsten copper composite gets the maximum of 2520 MPa, while its electrical conductivity reduces to 36.6IACS%; moreover, its oxygen content is only 4×10-6 and the nitrogen content is 3×10-6.

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高維娜,王慶相,楊 怡,范志康.靶材用鎢銅復(fù)合材料的制備工藝[J].稀有金屬材料與工程,2010,39(5):892~895.[Gao Weina, Wang Qingxiang, Yang Yi, Fan Zhikang. Fabrication Technology of Tungsten Copper Composite for Sputtering Material[J]. Rare Metal Materials and Engineering,2010,39(5):892~895.]
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  • 收稿日期:2009-05-24
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