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硅基微磁通門非晶Fe96Nb4鐵芯薄膜的研究
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國家自然科學基金項目（60874101）；西安應用材料創(chuàng)新基金項目（XA-AM-200707）；西北工業(yè)大學基礎基金（w018104）


Research on Silicon-Based Micro-Fluxgate Amorphous Fe96Nb4 Core Thin Film
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    摘要:

    采用磁控濺射法制備一種適合用于硅基微磁通門的新型非晶Fe96Nb4軟磁鐵芯薄膜，并利用X射線衍射儀、掃描電子顯微鏡、振動樣品磁強計測試薄膜的相組成、表面形貌、和磁滯回線，用雙鐵芯磁通門探頭線圈對制作的鐵芯薄膜進行試驗。結果表明：隨制備溫度的升高，薄膜的缺陷明顯減小，軟磁性能顯著改善?；瑴囟葹?30 K時制作的硅基Fe96Nb4鐵芯薄膜的性能適合用于微磁通門鐵芯材料。

    Abstract:

    A new type of amorphous Fe96Nb4 core soft-magnetic thin film suitable for silicon-based micro-fluxgate was prepared by magnetron sputtering technique. Its phase composition, surface morphology and magnetic hysteresis loop were characterized by X-ray diffractometer, SEM and VSM (vibration sample magnetometer), respectively. The core film was examined by a double-cores fluxgate sensor. The results show that the defects of films decrease when they are prepared at high temperature. Meanwhile, its soft magnetic properties are improved significantly. Silicon-based Fe96Nb4 core thin film prepared at 630 K of the substrate is suitable for the application in the micro-fluxgate iron core materials.

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梁晉濤,劉詩斌,張程煜.硅基微磁通門非晶Fe96Nb4鐵芯薄膜的研究[J].稀有金屬材料與工程,2010,39(5):871~873.[Liang Jintao, Liu Shibin, Zhang Chengyu. Research on Silicon-Based Micro-Fluxgate Amorphous Fe96Nb4 Core Thin Film[J]. Rare Metal Materials and Engineering,2010,39(5):871~873.]
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  • 收稿日期:2009-09-23
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