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退火升溫速率對VO2薄膜相變性能的影響
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Effect of Anneal Heating Rate on Phase Transition Characteristics of VO2 Thin Film
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    摘要:

    采用溶膠-凝膠法在云母（001）襯底表面制備氧化釩薄膜，然后通過高溫退火獲得VO2多晶膜。利用SEM、FTIR等手段，分析不同退火升溫速率條件下所制備薄膜的微觀形貌、光學(xué)性能和熱致相變特性。結(jié)果表明：在退火升溫速率為8 ℃/min時，所制備的VO2薄膜具有最優(yōu)異的熱致相變特性，相變溫度為65 ℃，滯后溫寬為10 ℃。

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    Vanadium oxide thin films were fabricated on muscovite (001) substrates by sol-gel method, and the polycrystalline VO2 films were obtained by subsequent high temperature annealing. The morphology, optic properties and thermochromic phase transition characteristics of vanadium dioxide thin films annealed at different heating rate were investigated by SEM and FTIR. Results show that after annealed at the heating rate of 8 oC/min, the VO2 films exhibit excellent thermochromic phase transition characteristics with phase transition temperature of 65 oC and hysteresis width of 10 oC.

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何 鵬,顏家振,黃婉霞,張 月,羅蓉蓉,蔡靖涵.退火升溫速率對VO2薄膜相變性能的影響[J].稀有金屬材料與工程,2010,39(5):867~870.[He Peng, Yan Jiazhen, Huang Wanxia, Zhang Yue, Luo Rongrong, Cai Jinghan. Effect of Anneal Heating Rate on Phase Transition Characteristics of VO2 Thin Film[J]. Rare Metal Materials and Engineering,2010,39(5):867~870.]
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  • 收稿日期:2009-07-12
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