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Ni/Au鍍層與SnPb焊點(diǎn)界面電遷移的極性效應(yīng)
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“十一五”總裝備部預(yù)研項(xiàng)目(51323060305);信息產(chǎn)業(yè)部電子第五研究所科技發(fā)展基金(XF0726130)


Polarity of Electromigration at the Interface between SnPb Solder Joints and Ni/Au Finishes
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    摘要:

    采用Ni(P)/Au鍍層-SnPb焊點(diǎn)-Ni(P)/Au鍍層的互連結(jié)構(gòu),研究電遷移作用下焊點(diǎn)/鍍層界面金屬間化合物(IMC)的極性生長特性,從電位差和化學(xué)位梯度條件下原子定向擴(kuò)散的角度分析互連結(jié)構(gòu)的微結(jié)構(gòu)變化的微觀機(jī)制。在無外加應(yīng)力條件下,由于液態(tài)反應(yīng)速率遠(yuǎn)遠(yuǎn)快于固態(tài)反應(yīng)速率,Ni(P)/Au鍍層與焊點(diǎn)界面IMC經(jīng)過120 ℃、100 h的熱處理后無明顯變化。但是,在電遷移作用下,由于Sn沿電子流方向的定向擴(kuò)散使陽極界面IMC異常生長,而陰極界面IMC厚度基本不變。由于電子由上層Cu布線進(jìn)入焊點(diǎn)的電子注入口位于三相結(jié)合界面位置,在焦耳熱的作用下會(huì)導(dǎo)致焊料的局部熔融,引起Cu布線與焊料的反應(yīng),使電子注入口的Cu布線合金化

    Abstract:

    The polarity of electromigration at the interface between solder joints and finishes was studied with the interconnects structure of Ni(P)/Au finishes-SnPb solder joint-Ni(P)/Au finishes. The mechanism of microstructural evaluation of interconnects was investigated in terms of directional diffusion of atoms under electrical and chemical potential. The IMC layers on the interface between Ni(P)/Au finishes and solder joints have only a little change in thickness after the annealing of 120 ℃ for 100 h because the velocity of wetting reaction is faster than the solid state reaction. But under the condition of electromigration, the directional diffusion of Sn atoms along the electron flow direction induces the abnormal growth of IMC on the anode interface, and the restraint at cathode. The cathode contact is on the upside, where the electron current enters the solder bump, and locates at the triple point. The solder would melt at this point by Joule heating, resulting in the reaction between the Cu wire and solder.

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陸裕東,何小琦,恩云飛,王 歆,莊志強(qiáng). Ni/Au鍍層與SnPb焊點(diǎn)界面電遷移的極性效應(yīng)[J].稀有金屬材料與工程,2010,39(2):254~257.[Lu Yudong, He Xiaoqi, En Yunfei, Wang Xin, Zhuang Zhiqiang. Polarity of Electromigration at the Interface between SnPb Solder Joints and Ni/Au Finishes[J]. Rare Metal Materials and Engineering,2010,39(2):254~257.]
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  • 收稿日期:2009-09-11
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