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Au/CdZnTe電極接觸的熱處理優(yōu)化工藝
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Optimized Process of Thermal Treatment of Au/CdZnTe Contacts
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Supported by the National Natural Science Foundation of China (10675080) and (60676002) and the Shanghai Leading Academic Discipline (S30107)

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    摘要:

    系統(tǒng)研究在空氣氣氛下熱處理溫度對(duì)真空蒸發(fā)法制備Au/CdZnTe電極接觸特性的影響。結(jié)果表明，在353~373 K溫度范圍內(nèi)進(jìn)行熱處理可以獲得更優(yōu)化的電極接觸性能，測(cè)試得到電極與CdZnTe接觸勢(shì)壘較低，接觸電阻較小，歐姆系數(shù)最佳，并且不會(huì)破壞CdZnTe體材料本身的性能。而當(dāng)熱處理溫度高于400 K時(shí)，Au電極沉積表面形貌明顯變差，CdZnTe樣品的漏電流大幅增加。這可能是由于隨著熱處理溫度的增加，CdZnTe體材料表面的Cd升華加劇，產(chǎn)生大量的Cd空位引起的。

    Abstract:

    Effects of thermal treatment temperatures from 323 K to 473 K in air atmosphere on the Au/CdZnTe contacts fabricated by thermal vacuum evaporation was investigated systematically. The results show that the optimized performances of the Au/CdZnTe contacts after thermal treatment in air at a range of 353-373 K can be obtained, that is, the contacts possess lower barrier height, smaller contact resistance and better ohmic coefficient, without damaging bulk CdZnTe properties. Nevertheless, performing thermal treatment over 400 K, the deposited surface of Au electrodes will grow worse apparently, and the leakage current of CdZnTe samples enhances significantly. This might be attributed to the increase of the Cd vacancies produced by Cd sublimation from the CdZnTe into air atmosphere with the increase of temperature.

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梁小燕,閔嘉華,王長(zhǎng)君,桑文斌,顧 瑩,趙 岳,周晨瑩. Au/CdZnTe電極接觸的熱處理優(yōu)化工藝[J].稀有金屬材料與工程,2009,38(12):2085-2088~.[Liang Xiaoyan, Min Jiahua, Wang Changjun, Sang Wenbin, Gu Ying, Zhao Yue, Zhou Chenying. Optimized Process of Thermal Treatment of Au/CdZnTe Contacts[J]. Rare Metal Materials and Engineering,2009,38(12):2085-2088~.]
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  • 收稿日期:2008-11-22
  • 最后修改日期:2008-12-15
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