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陰極弧徑向不同位置膜層性能分布規(guī)律
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國家自然科學基金(10575025);哈爾濱市優(yōu)秀學科帶頭人基金(2006RFXXS012)聯合資助


Uniformity of Thickness and Surface Properties of TiN Films Deposited by Vacuum Arc
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    摘要:

    利用陰極弧沉積的方法在201不銹鋼基體上制備了TiN薄膜,研究了陰極弧徑向不同位置大顆粒、膜厚以及膜層性能的分布規(guī)律。分別采用X射線衍射(XRD)和掃描電子顯微鏡(SEM)分析了膜層的相結構、膜層的表面形貌和截面形貌。研究了鍍膜試樣和基體在3.5%(質量分數)NaCl溶液中的腐蝕行為,并利用電化學方法分析其抗腐蝕性能,并采用球-盤式摩擦磨損、劃痕測試以及微小壓痕等方法測試了徑向不同位置沉積的TiN薄膜摩擦磨損性能、膜基結合力以及硬度。結果表明,靠近靶材中心的位置,膜層的硬度、厚度最大,電化學腐蝕電位最高,

    Abstract:

    During vacuum arc deposition processes, non-uniformity of thickness and surface properties of deposited films may be induced due to the line-of-sight of vacuum arc plasma. In this paper TiN films were deposited on AISI201 stainless steel horizontally located in front of the arc source and the uniformity of macroparticle, film thickness and surface properties is focused on. The phase structure, surface morphology and corrosion-resistance were analysized by XRD, SEM and electrochemical method. The frictional behavior of uncoated and coated stainless steel was evaluated by pin-on-disk tribometer. The scratch test and micro indentor were utilized to determine the adhesion and hardness of TiN films. The experimental results have demonstrated that TiN film deposited at center site possesses maximal hardness,highest corrosion-resistance and largest thickness. In contrast the TiN films at angle of 20o display minimal thickness and hardness. There are more macroparticles on films deposited at positive angles leading to weak corrosion-resistance. This may be attributed to the force of gas flow induced by pumping system. The friction coefficient and adhesion of TiN films at central site are larger compared to those at other sites.

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魏永強,鞏春志,田修波,楊士勤.陰極弧徑向不同位置膜層性能分布規(guī)律[J].稀有金屬材料與工程,2009,38(5):788~793.[Wei Yongqiang, Gong Chunzhi, Tian Xiubo, Yang Shiqin. Uniformity of Thickness and Surface Properties of TiN Films Deposited by Vacuum Arc[J]. Rare Metal Materials and Engineering,2009,38(5):788~793.]
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  • 收稿日期:2008-05-30
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