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氨化Ga2O3 /Nb膜制備的GaN納米線的光學(xué)和微觀結(jié)構(gòu)特性的研究
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Optical and Micro-structural Properties of GaN Nanowires by Ammoniating Ga2O3 /Nb Films
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National Natural Science Foundation of China(Grant No90301002) and Supported by the Key Research Program of the National Natural Science Foundation of China(Grant No 90201025)

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    摘要:

    采用射頻磁控濺射技術(shù)在硅襯底上制備Ga2O3/Nb薄膜,然后在900 °C下于流動(dòng)的氨氣中進(jìn)行氨化制備GaN納米線。用X射線衍射(XRD)、透射電子顯微鏡(TEM)和高分辨透射電子顯微鏡詳細(xì)分析了GaN納米線的結(jié)構(gòu)和形貌。結(jié)果表明:采用此方法得到的GaN納米線有直的形態(tài)和光滑的表面,其納米線的直徑大約50 nm,納米線的長(zhǎng)約幾個(gè)微米。室溫下以325 nm波長(zhǎng)的光激發(fā)樣品表面,只顯示出一個(gè)位于367 nm的很強(qiáng)的紫外發(fā)光峰。最后,簡(jiǎn)單討論了GaN納米線的生長(zhǎng)機(jī)制。

    Abstract:

    Single-crystalline GaN nanowires have been synthesized on Si(111) substrates by magnetron sputtering through ammoniating the Ga2O3/Nb films at 900 °C in a quartz tube. The as-prepared nanowires are confirmed as single crystalline GaN with wurtzite structure by X-ray diffraction (XRD), selected-area electron diffraction (SAED) and high-resolution transmission electron microscopy (HRTEM). Transmission electron microscopy (TEM) shows that the GaN nanowires are straight and smooth, and possess the diameters of about 50 nm and lengths up to several microns. When excited by 325 nm helium-cadmium (He-Cd) laser light at room temperature, the GaN nanowires only have a strong ultraviolet luminescence peak located at 367 nm, owing to GaN band-edge emission. Finally, the growth mechanism of GaN nanowires is discussed briefly.

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莊惠照,李保理,王德曉,申加兵,張士英,薛成山.氨化Ga2O3 /Nb膜制備的GaN納米線的光學(xué)和微觀結(jié)構(gòu)特性的研究[J].稀有金屬材料與工程,2009,38(4):565~569.[Zhuang Huizhao, Li Baoli, Wang Dexiao, Shen Jiabing, Zhang Shiying, Xue Chengshan. Optical and Micro-structural Properties of GaN Nanowires by Ammoniating Ga2O3 /Nb Films[J]. Rare Metal Materials and Engineering,2009,38(4):565~569.]
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  • 收稿日期:2008-04-10
  • 最后修改日期:2008-06-07
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