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SiO2緩沖層對(duì)柔性ITO薄膜特性的影響
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北京市自然科學(xué)基金（3063022）；北京理工大學(xué)優(yōu)秀青年教師資助計(jì)劃（059852）


Effects of SiO2 Buffer Layer on the Characteristics of Flexible ITO Films
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    摘要:

    利用離子輔助蒸發(fā)技術(shù)在PET塑料襯底上制備柔性ITO薄膜，重點(diǎn)分析了柔性ITO薄膜在增加SiO2緩沖層前后的性能變化。采用X射線衍射、紫外-可見分光光度計(jì)、四探針電阻測量儀、NT100光學(xué)輪廓儀等測試手段對(duì)薄膜樣品進(jìn)行表征。實(shí)驗(yàn)結(jié)果表明：增加緩沖層后，柔性ITO薄膜的X射線衍射特征峰的強(qiáng)度增加；薄膜電阻率減小為1.21×10-3 Ω·cm；可見光峰值透過率為85%左右；表面相對(duì)光滑；薄膜電阻在一定的彎曲狀態(tài)保持一定的穩(wěn)定性

    Abstract:

    The flexible ITO films were fabricated on PET substrate by Ion Beam Assisted Deposition(IBAD), and the effects of SiO2 buffer layer on the properties of ITO films were researched. The properties of ITO films were studied using X-ray diffraction (XRD), UV-VIS spectrometer, four-point probe and optical profiler. The results show that the SiO2 interlayer between ITO films and PET results in an increase of X-ray peak intensity of ITO film and a decrease of resistivity to 1.21×10-3 Ω·cm; in addition, the transmittance decreases to 85% and the surface is relatively smooth. The resistivity of the ITO films bent to some extent keeps some stability

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喻志農(nóng),相龍鋒,李玉瓊,薛 唯. SiO2緩沖層對(duì)柔性ITO薄膜特性的影響[J].稀有金屬材料與工程,2009,38(3):443~446.[Yu Zhinong, Xiang Longfeng, Li Yuqiong, Xue Wei. Effects of SiO2 Buffer Layer on the Characteristics of Flexible ITO Films[J]. Rare Metal Materials and Engineering,2009,38(3):443~446.]
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  • 收稿日期:2008-02-10
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