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PZT鐵電薄膜電極材料研究進(jìn)展
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TN340.9

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Electrode of PZT Thin Films: Review of Materials, Structures, and Properties
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    摘要:

    近幾年,PZT鐵電存儲器的商業(yè)應(yīng)用受到了廣泛關(guān)注,但PZT電容器的疲勞現(xiàn)象已成為其應(yīng)用的嚴(yán)重障礙,變換電極是改善PZT電容器抗疲勞特性的有效方法.系統(tǒng)地介紹了PZT鐵電薄膜用電極材料的結(jié)構(gòu)、性能及其特點(diǎn),比較了不同電極材料對PZT鐵電薄膜結(jié)構(gòu)及鐵電性能的影響,并對導(dǎo)電金屬氧化物電極改善抗疲勞特性的機(jī)制進(jìn)行了一定的分析,提出了電極材料的主要問題和發(fā)展方向.

    Abstract:

    An increasing interest in PZT ferroelectric memories is presented for their commercial applications in recent years, but fatigue behavior of PZT capacitors has been a critical problem in commercial applications for FRAM devices. Changing of electrode materials of PZT capacitors is an effective method to overcome the fatigue behavior of PZT capacitors. In this paper the structure, properties and characteristics of electrode materials for PZT thin films are introduced systematically. The effect of different electrode materials on structure and ferroelectric properties of PZT thin films are compared. The mechanism how to improve the ferroelectric properties of PZT capacitors via conducting metal oxide electrodes are discussed. The main problems and directions of development of electrodes are presented.

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孫秋,成海濤,王福平. PZT鐵電薄膜電極材料研究進(jìn)展[J].稀有金屬材料與工程,2008,37(2):200~204.[Sun Qiu, Cheng Haitao, Wang Fuping. Electrode of PZT Thin Films: Review of Materials, Structures, and Properties[J]. Rare Metal Materials and Engineering,2008,37(2):200~204.]
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  • 收稿日期:2007-01-31
  • 最后修改日期:2007-11-09
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