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MOCVD外延Al_2O_3基AlGaN/GaN超晶格的結(jié)構(gòu)和光學(xué)特性
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國(guó)家自然科學(xué)基金資助(50272019),哈爾濱工業(yè)大學(xué)?;鹳Y助(HIT.2001.15)


Microstructures and Optical Characteristics of AlGaN/GaN Based on Al_2O_3 Prepared by MOCVD
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    摘要:

    通過X射線衍射分析、透射電鏡觀察、紅外透射光譜分析、紫外-可見吸收光譜分析和光致發(fā)光試驗(yàn),研究了用金屬有機(jī)物化學(xué)汽相沉積(MOCVD)的方法,在帶有GaN緩沖層的藍(lán)寶石(Al2O3)襯底上生長(zhǎng)的AlGaN/GaN超晶格材料的微觀結(jié)構(gòu)、光吸收性質(zhì)和發(fā)光特性。X射線衍射結(jié)果表明,GaN基材料均為纖鋅礦六方結(jié)構(gòu),薄膜具有良好的結(jié)晶質(zhì)量,薄膜生長(zhǎng)沿c軸擇優(yōu)取向。透射電鏡觀察表明,超晶格試樣的周期結(jié)構(gòu)分布均勻,實(shí)際周期為13.3nm,且觀察到高密度的位錯(cuò)存在于外延膜中。通過光學(xué)試驗(yàn)數(shù)據(jù),確定了試樣的光學(xué)吸收邊都是在370nm附近,理論計(jì)算顯示試樣為直接躍遷型半導(dǎo)體,禁帶寬度約為3.4eV。試樣的折射率隨光子能量的增加而增加、隨波長(zhǎng)的增加而減小,計(jì)算表明消光系數(shù)的極小值位于370nm處。光致發(fā)光測(cè)試分析表明,超晶格有很好的發(fā)光性能,并發(fā)現(xiàn)存在黃帶發(fā)光。

    Abstract:

    The microstructure, optical absorption properties and luminescence function of GaN thin films grown on the sapphire substrate with the buffer layer of GaN by MOCVD have been studied by means of XRD, TEM, infrared transmission spectrum, and photoluminescence. The XRD results show that the crystal of GaN is hexagonal wurtzite structure. The thin films have perferred orientation in c axis with very high quality. The TEM images of cross-sectional specimen show that the thicknesses of every layer in the superlattices are uniform with the average period of 13.3 nm, but there are high-density dislocations in the superlattices region. With the related optical experimental data, it had been found that the optical absorption edge was at about 370 nm. The theory calculation indicates that the five samples are direct transition semiconductor with band-gaps of about 3.4 eV. The refractive indexes of the samples increase with the photon energy enhance and decrease with the wavelength increasing. The results show that the extinction coefficients have the minimum at 370 nm. Photoluminescence test results show that the superlattice has preferable luminescence property and a yellow luminescence is found.

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李美成,邱永鑫,李洪明,趙連城. MOCVD外延Al_2O_3基AlGaN/GaN超晶格的結(jié)構(gòu)和光學(xué)特性[J].稀有金屬材料與工程,2005,34(9).[Li Meicheng, Qiu Yongxin, Li Hongming, Zhao Liancheng. Microstructures and Optical Characteristics of AlGaN/GaN Based on Al_2O_3 Prepared by MOCVD[J]. Rare Metal Materials and Engineering,2005,34(9).]
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