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退火處理對SnO2:Sb薄膜結(jié)構(gòu)和光致發(fā)光性質(zhì)的影響
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TN304.21

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教育部科學(xué)技術(shù)研究重點項目(02165);博士點基金資助項目(20020422056)


Effect of Annealing on Structure and Photoluminescence Characters of SnO2:Sb Thin Films
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    摘要:

    用射頻磁控濺射法在玻璃襯底上制備出SnO2:Sb薄膜,研究了不同摻雜和退火對薄膜結(jié)構(gòu)的影響。制備薄膜是具有純氧化錫四方金紅石結(jié)構(gòu)的多晶膜薄,晶粒生長的擇優(yōu)取向為(110)。室溫下光致發(fā)光測量首次觀測到392nm附近存在紫外-紫光發(fā)射,并對SnO2:Sb的光致發(fā)光機(jī)制進(jìn)行了探索性研究。

    Abstract:

    The SnO2:Sb films was prepared on glass substrates by rf magnetron sputtering method. The effect of different doping content and annealing on structure of the thin films were investigated. Result show that the prepared samples are polycrystalline thin films with rutile structure of pure SnO2 and have orientation of (110) direction. The crystallization of the samples changes with the different doping content and annealing conditions. The photoluminescence of the samples was measured at room temperature. For the first time, a UV-violet luminescence peak near 392 nm was observed, and the luminescence mechanism was also tentatively investigated.

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王玉恒 馬瑾 計峰 余旭滸 馬洪磊.退火處理對SnO2:Sb薄膜結(jié)構(gòu)和光致發(fā)光性質(zhì)的影響[J].稀有金屬材料與工程,2005,34(11):1747~1750.[Wang Yuheng, Ma Jin, Ji Feng, Yu Xuhu, Ma Honglei. Effect of Annealing on Structure and Photoluminescence Characters of SnO2:Sb Thin Films[J]. Rare Metal Materials and Engineering,2005,34(11):1747~1750.]
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  • 收稿日期:2004-10-25
  • 最后修改日期:2004-10-25
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