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氨氣和氮?dú)鈿夥障聼崽幚韺?duì)ITO薄膜光電性能的影響
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Influence of Heat Treatment in Different Atmospheres upon Optical and Electrical Properties of ITO Films
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    摘要:

    利用射頻磁控濺射在室溫玻璃襯底上制備了氧化銦錫（ITO）薄膜，并分別在氨氣、氮?dú)夂涂諝鈿夥障聦?duì)薄膜進(jìn)行了熱處理。利用X射線衍射、霍爾效應(yīng)、UV-VIS-NIR分光光度計(jì)等測(cè)試手段對(duì)薄膜樣品進(jìn)行表征，研究了不同熱處理氣氛及溫度對(duì)ITO薄膜光電特性的影響。結(jié)果發(fā)現(xiàn)在不同氣氛下熱處理均能明顯提高ITO薄膜在可見(jiàn)光區(qū)的透過(guò)率，氨氣氣氛下更有利于薄膜導(dǎo)電特性的改善。

    Abstract:

    ITO films were prepared by r.f. magnetron sputtering, and were annealed in ammonia, nitrogen and air atmosphere respectively. The annealing effects on electrical and optical properties of ITO films under different atmospheres were studied using X-ray diffraction (XRD), Hall Effect and UV-VIS-NIR spectrometer. The transmission of ITO films is greatly improved by the heat treatments in all atmospheres. The electrical properties of ITO films annealed in ammonia are better than in other two atmospheres.

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楊盟 刁訓(xùn)剛 劉海鷹 王天民.氨氣和氮?dú)鈿夥障聼崽幚韺?duì)ITO薄膜光電性能的影響[J].稀有金屬材料與工程,2005,34(10):1637~1641.[Yang Meng, Diao Xungang, Liu Haiying, Wang Tianmin. Influence of Heat Treatment in Different Atmospheres upon Optical and Electrical Properties of ITO Films[J]. Rare Metal Materials and Engineering,2005,34(10):1637~1641.]
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  • 收稿日期:2004-06-15
  • 最后修改日期:2004-06-15
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