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納米復(fù)合Ti-B-N薄膜的結(jié)構(gòu)和摩擦學(xué)性能
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TG174.44

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國家“863”高技術(shù)項(xiàng)目（2001AA338010）;國家自然科學(xué)基金（50271053）：歐盟第5框架計(jì)劃項(xiàng)目（GRD2001-40419）：中科院蘭州化物所固體潤(rùn)滑國家重點(diǎn)項(xiàng)目（200101）


Structure and Tribological Characteristics of Nanocomposite Ti-B-N Coatings
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    摘要:

    研究了射頻等離了體輔助化學(xué)氣相沉積（PCVD）技術(shù)獲得的Ti-B-N薄膜的組織結(jié)構(gòu)和力學(xué)性能。結(jié)果發(fā)現(xiàn)，B元素的加入使薄膜中出現(xiàn)TiN納米晶和BN非晶（nc-TiN／a-BN）的復(fù)合結(jié)構(gòu)，其硬度顯著高于TiN薄膜，最高可達(dá)40GPa。用球盤式摩擦磨損實(shí)驗(yàn)考察了薄膜的磨損特性。結(jié)果表明：與TiN薄膜相比，Ti-B-N薄膜抗磨損性能有顯著提高，磨損機(jī)制與TiN薄膜不同，摩擦系數(shù)較TiN稍高。

    Abstract:

    The structure and properties of Ti-B-N coatings prepared by radio-frequency plasma-enhanced chemical vapor deposition (rf-PCVD) have been investigated in this work. The coatings were characterized by energy dispersive X-ray analysis (EDX), X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and optical microscopy. Ball-on-disk tribometer and microscopic hardness tester were employed in evaluating the mechanical properties of the coatings. The results show that the structure of the coatings is a nanocomposite, where nanocrystalline TiN is embedded in the amorphous BN and TiB2 matrix. Compared with TiN coatings, the micro-hardness of Ti-B-N coatings can reach 40 GPa. The wear resistances of Ti-B-N coatings remarkably increase with a certain addition of boron, which caused the change of friction mechanism of TiN coatings, although its friction coefficient is higher than that of TiN.

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馬大衍 馬勝利 徐可為 劉維民 S．Veprek.納米復(fù)合Ti-B-N薄膜的結(jié)構(gòu)和摩擦學(xué)性能[J].稀有金屬材料與工程,2005,34(10):1597~1600.[Ma Dayan, Ma Shengli, Xu Kewei, Liu Weimin, S. Veprek. Structure and Tribological Characteristics of Nanocomposite Ti-B-N Coatings[J]. Rare Metal Materials and Engineering,2005,34(10):1597~1600.]
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  • 收稿日期:2004-02-19
  • 最后修改日期:2004-02-19
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