TG146.4
國(guó)家自然科學(xué)基金資助項(xiàng)目(59931010)
王飛 徐可為.磁控濺射Cu膜屈服強(qiáng)度的有限元計(jì)算[J].稀有金屬材料與工程,2004,33(11):1203~1205.[Wang Fei, Xu Kewei. The Yield Strength Calculated by Finite Element Method for Sputtered Cu Film[J]. Rare Metal Materials and Engineering,2004,33(11):1203~1205.]
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