最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級(jí)檢索
磁控濺射Cu膜屈服強(qiáng)度的有限元計(jì)算
DOI:
作者:
作者單位:

作者簡(jiǎn)介:

通訊作者:

中圖分類號(hào):

TG146.4

基金項(xiàng)目:

國(guó)家自然科學(xué)基金資助項(xiàng)目(59931010)


The Yield Strength Calculated by Finite Element Method for Sputtered Cu Film
Author:
Affiliation:

Fund Project:

  • 摘要
  • |
  • 圖/表
  • |
  • 訪問統(tǒng)計(jì)
  • |
  • 參考文獻(xiàn)
  • |
  • 相似文獻(xiàn)
  • |
  • 引證文獻(xiàn)
  • |
  • 資源附件
  • |
  • 文章評(píng)論
    摘要:

    采用離子輔助轟擊共濺射設(shè)備,在Si基體的(111)晶面上制得了所需的銅膜。采用納米壓入實(shí)驗(yàn),獲得不同退火溫度下Cu膜的彈性模量和硬度。再在納米壓入實(shí)驗(yàn)的基礎(chǔ)上,結(jié)合有限元模型計(jì)算不同退火溫度下磁控濺射得到的Cu膜屈服強(qiáng)度。發(fā)現(xiàn)Cu膜的屈服強(qiáng)度遠(yuǎn)高于整體Cu材料的屈服強(qiáng)度,并且退火溫度對(duì)薄膜的屈服強(qiáng)度影響很大。通過XRD測(cè)量發(fā)現(xiàn)其主要原因是退火改變了晶粒尺寸和多晶Cu膜的晶粒取向分布,而導(dǎo)致Cu膜屈服強(qiáng)度的降低。

    Abstract:

    The Cu thin films on (111) of Si substrate were prepared by the co-sputtering equipment of ion beam enhance deposition, using the nano-indentation experiments, the elastic moduli and hardnesses of Cu films at different annealing temperature were obtained. The yield strength of Cu film was calculated by FEM model based on the nano-indentation experiments. It is found that yield strength of Cu film is much higher than that of bulk of Cu. And the annealing temperature affects the yield strength of film greatly. From XRD spectrum, it is analyzed that the decrease of yield strength of Cu film results from the change of crystal size and crystal plane.

    參考文獻(xiàn)
    相似文獻(xiàn)
    引證文獻(xiàn)
引用本文

王飛 徐可為.磁控濺射Cu膜屈服強(qiáng)度的有限元計(jì)算[J].稀有金屬材料與工程,2004,33(11):1203~1205.[Wang Fei, Xu Kewei. The Yield Strength Calculated by Finite Element Method for Sputtered Cu Film[J]. Rare Metal Materials and Engineering,2004,33(11):1203~1205.]
DOI:[doi]

復(fù)制
文章指標(biāo)
  • 點(diǎn)擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:
  • 最后修改日期:2003-03-24
  • 錄用日期:
  • 在線發(fā)布日期:
  • 出版日期: