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懸臂梁法測量不銹鋼基體上銅膜和銀膜殘余應(yīng)力
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TG115.5

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國家自然科學(xué)基金資助項目(59831040)，國家博士學(xué)科點基金資助項目


Determination of Residual Stresses in Cu and Ag Films on Stainless Steel Substrates by Cantilever Beam Method
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    摘要:

    用懸臂梁法研究了不銹鋼4Cr13基體上的Cu膜和Ag膜的平均殘余應(yīng)力和殘余應(yīng)力分布。結(jié)果表明，Cu膜和Ag膜的平均殘余應(yīng)力和分布殘余應(yīng)力隨膜厚的增加而急劇減小。2種膜生長過程中界面應(yīng)力很大，而生長應(yīng)力很小。Cu膜在厚度較小時，殘余應(yīng)力值很大，超過了銅塊材的斷裂強度。

    Abstract:

    Mean and local residual stresses in Cu films and Ag films on 4Cr13 substrates are evaluated by cantilever beam method. The results show that the mean and local residual stresses in Cu films and Ag films decrease abruptly with the film thickness, then tend to be stable. The residual stress in the two kinds of films mainly originates from the interfacial misfit strain. Their interfacial stress is very large and the growing stress is small. The mean value of residual stress in thin Cu films is very large, even beyond the fracture strength of the bulk Cu material.

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任鳳章 周根樹 趙文軫 胡志忠 鄭茂盛.懸臂梁法測量不銹鋼基體上銅膜和銀膜殘余應(yīng)力[J].稀有金屬材料與工程,2003,(6):478~480.[Ren Fengzhang, Zhou Genshu, Zhao Wenzhen, Hu Zhizhong, Zheng Maosheng. Determination of Residual Stresses in Cu and Ag Films on Stainless Steel Substrates by Cantilever Beam Method[J]. Rare Metal Materials and Engineering,2003,(6):478~480.]
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  • 最后修改日期:2001-09-10
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