AlN piezoelectric film has a lot of excellent physical chemistry properties.This discussion focus on the str uctural characters,pre-pared methods and applied prospect o f AlN piezoelectric films.
參考文獻
相似文獻
引證文獻
引用本文
許小紅 武海順 等. AlN壓電薄膜材料研究進展[J].稀有金屬材料與工程,2002,(6):456~459.[Xu Xiaohong, Wu Haishun, Zhang Fuqiang, Duan Jingfang, Li Zuoyi . The Research Progress of AlN Piezoelectric Thin Films[J]. Rare Metal Materials and Engineering,2002,(6):456~459.] DOI：[doi]