最新色国产精品精品视频,中文字幕日韩一区二区不卡,亚洲有码转帖,夜夜躁日日躁狠狠久久av,中国凸偷窥xxxx自由视频

+高級(jí)檢索
不同工藝制備的鐵電薄膜底電極Pt／Ti
DOI:
作者:
作者單位:

作者簡(jiǎn)介:

通訊作者:

中圖分類號(hào):

TN384 O484

基金項(xiàng)目:

國(guó)家“863”!715－002－0110，國(guó)家自然科學(xué)基金!6973020


Pt/Ti Bottom Electrodes of Ferroelectric Thin Films Fabricated by Electron Beam Evaporating and DC-Sputtering
Author:
Affiliation:

Fund Project:

  • 摘要
    • |
  • 圖/表
    • |
  • 訪問統(tǒng)計(jì)
    • |
  • 參考文獻(xiàn)
    • |
  • 相似文獻(xiàn)
    • |
  • 引證文獻(xiàn)
    • |
  • 資源附件
    • |
  • 文章評(píng)論
    摘要:

    采用高真空電子束蒸與直流濺射在ＳｉＯ２／Ｓｉ基底上制備Ｐｔ／Ｔｉ底電極，對(duì)Ｐｔ／Ｔｉ在不同熱處理溫度下的結(jié)構(gòu)與形貌進(jìn)行對(duì)比研究。結(jié)果表明；由于采用不同的制備工藝，Ｐｔ晶粒在成核與生長(zhǎng)方式上有所不同，導(dǎo)致了Ｐｔ薄膜在結(jié)構(gòu)與形貌的差異。

    Abstract:

    The microstructures and morphologies 0f Pt/Ti electrodes produced by ultra-high vacuum (UHV) electron beam evaporating and dc-sputtering at various temperatures have been investigated using X-ray diffraction, scanning electron microscopy and atomicforce microscopy. The results indicate that the microstructures and morphologies of Pt/Ti electrodes are dependent on the variousgrowing modes of Pt/Ti crystal grains. A dense columnar grain structure and texture were observed as a resu1t of electron beam vaporation. UHV electron beam evaporation results in a continuous and stable Pt/Ti film at high temperatures and is reccomended as a bottom electrode processing method for the preparation of ferroelectric thin films with fine properties.

    參考文獻(xiàn)
    相似文獻(xiàn)
    引證文獻(xiàn)
引用本文

宋志棠 曾建明.不同工藝制備的鐵電薄膜底電極Pt／Ti[J].稀有金屬材料與工程,1999,(5):305~309.[Song Zhitang, Zeng Jianming, Gao Jianxia, Zhang Miao, Ling Chenglu. Pt/Ti Bottom Electrodes of Ferroelectric Thin Films Fabricated by Electron Beam Evaporating and DC-Sputtering[J]. Rare Metal Materials and Engineering,1999,(5):305~309.]
DOI：[doi]

復(fù)制
文章指標(biāo)
  • 點(diǎn)擊次數(shù):
  • 下載次數(shù):
  • HTML閱讀次數(shù):
  • 引用次數(shù):
歷史
  • 收稿日期:
  • 最后修改日期:
  • 錄用日期:
  • 在線發(fā)布日期:
  • 出版日期: