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TiAlBN多元膜的性能與組織結(jié)構(gòu)研究
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TG174.444 TG146.23

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Study of Performances and Microstructure of TiAlBN Films
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    摘要:

    采用電弧離子鍍技術(shù)、TA5鈦合金靶沉積TiAlBN薄膜,研究了這種多元膜的顯微硬度、高溫氧化性能和組織結(jié)構(gòu),結(jié)果表明:這種多元膜具有優(yōu)于TiN膜的顯微硬度;不同于TiN膜的顯微組織,其最顯著的特征是存在一些細(xì)小的鈦滴;雙靶工作狀態(tài)下,這些鈦滴與膜之間的融合效果較好,膜層表面孔隙較少;薄膜具有TiN的面心立方結(jié)構(gòu),與TiN膜相比,具有更加明顯的擇優(yōu)取向趨勢。

    Abstract:

    TiAlBN films have been deposited by cathode arc ion-plating with TA5 titanium alloy target. The performance and microstructure have been studied. The results show that the microhardness of the multi-component films is higher than that of TiN films. The films have better high temperature oxidation performance than that of TiN films. The microstructure of the multi-component films is quite different from TiN films. The microstructure of the multi-component films is characteristic of some small titanium droplets. The titanium droplets are combined with the films substrate and there are a few pores in the films surface in the condition of double targets. It is found that the preferred orientation exists in the films.

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. TiAlBN多元膜的性能與組織結(jié)構(gòu)研究[J].鈦工業(yè)進(jìn)展,2004,21(3):24-29.

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  • 最后修改日期:2003-08-11
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